JPS62114447U - - Google Patents

Info

Publication number

JPS62114447U

JPS62114447U JP222686U JP222686U JPS62114447U JP S62114447 U JPS62114447 U JP S62114447U JP 222686 U JP222686 U JP 222686U JP 222686 U JP222686 U JP 222686U JP S62114447 U JPS62114447 U JP S62114447U

Authority

JP

Japan

Prior art keywords

wiring part

lower wiring

semiconductor device

insulating film

interlayer insulating

Prior art date

1986-01-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 6
• 239000011229 interlayer Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 1
• 239000010410 layer Substances 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1