JPS62114055U - - Google Patents

Info

Publication number
JPS62114055U
JPS62114055U JP77586U JP77586U JPS62114055U JP S62114055 U JPS62114055 U JP S62114055U JP 77586 U JP77586 U JP 77586U JP 77586 U JP77586 U JP 77586U JP S62114055 U JPS62114055 U JP S62114055U
Authority
JP
Japan
Prior art keywords
evaporation
hearth
evaporation source
opening
deck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP77586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241167Y2 (US20030204162A1-20031030-M00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP77586U priority Critical patent/JPH0241167Y2/ja
Publication of JPS62114055U publication Critical patent/JPS62114055U/ja
Application granted granted Critical
Publication of JPH0241167Y2 publication Critical patent/JPH0241167Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP77586U 1986-01-08 1986-01-08 Expired JPH0241167Y2 (US20030204162A1-20031030-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP77586U JPH0241167Y2 (US20030204162A1-20031030-M00002.png) 1986-01-08 1986-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP77586U JPH0241167Y2 (US20030204162A1-20031030-M00002.png) 1986-01-08 1986-01-08

Publications (2)

Publication Number Publication Date
JPS62114055U true JPS62114055U (US20030204162A1-20031030-M00002.png) 1987-07-20
JPH0241167Y2 JPH0241167Y2 (US20030204162A1-20031030-M00002.png) 1990-11-01

Family

ID=30778060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP77586U Expired JPH0241167Y2 (US20030204162A1-20031030-M00002.png) 1986-01-08 1986-01-08

Country Status (1)

Country Link
JP (1) JPH0241167Y2 (US20030204162A1-20031030-M00002.png)

Also Published As

Publication number Publication date
JPH0241167Y2 (US20030204162A1-20031030-M00002.png) 1990-11-01

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