JPS62112148U - - Google Patents
Info
- Publication number
- JPS62112148U JPS62112148U JP55886U JP55886U JPS62112148U JP S62112148 U JPS62112148 U JP S62112148U JP 55886 U JP55886 U JP 55886U JP 55886 U JP55886 U JP 55886U JP S62112148 U JPS62112148 U JP S62112148U
- Authority
- JP
- Japan
- Prior art keywords
- prober
- semiconductor substrate
- section
- carrier
- stage section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229920003023 plastic Polymers 0.000 claims 1
- 239000000523 sample Substances 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55886U JPS62112148U (enExample) | 1986-01-07 | 1986-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55886U JPS62112148U (enExample) | 1986-01-07 | 1986-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62112148U true JPS62112148U (enExample) | 1987-07-17 |
Family
ID=30777634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55886U Pending JPS62112148U (enExample) | 1986-01-07 | 1986-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62112148U (enExample) |
-
1986
- 1986-01-07 JP JP55886U patent/JPS62112148U/ja active Pending