JPS6211169U - - Google Patents
Info
- Publication number
- JPS6211169U JPS6211169U JP9833085U JP9833085U JPS6211169U JP S6211169 U JPS6211169 U JP S6211169U JP 9833085 U JP9833085 U JP 9833085U JP 9833085 U JP9833085 U JP 9833085U JP S6211169 U JPS6211169 U JP S6211169U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- vacuum vessel
- material supply
- metal
- raw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 10
- 238000001883 metal evaporation Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims 3
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9833085U JPS6211169U (ko) | 1985-06-29 | 1985-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9833085U JPS6211169U (ko) | 1985-06-29 | 1985-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6211169U true JPS6211169U (ko) | 1987-01-23 |
Family
ID=30966161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9833085U Pending JPS6211169U (ko) | 1985-06-29 | 1985-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6211169U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012020681A1 (ja) * | 2010-08-09 | 2012-02-16 | シンフォニアテクノロジー株式会社 | 被処理物投入装置 |
| JP2013083389A (ja) * | 2011-10-07 | 2013-05-09 | Sinfonia Technology Co Ltd | 被処理物投入装置 |
-
1985
- 1985-06-29 JP JP9833085U patent/JPS6211169U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012020681A1 (ja) * | 2010-08-09 | 2012-02-16 | シンフォニアテクノロジー株式会社 | 被処理物投入装置 |
| JP2013083389A (ja) * | 2011-10-07 | 2013-05-09 | Sinfonia Technology Co Ltd | 被処理物投入装置 |