JPS62110262U - - Google Patents
Info
- Publication number
- JPS62110262U JPS62110262U JP19971185U JP19971185U JPS62110262U JP S62110262 U JPS62110262 U JP S62110262U JP 19971185 U JP19971185 U JP 19971185U JP 19971185 U JP19971185 U JP 19971185U JP S62110262 U JPS62110262 U JP S62110262U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- opening
- openings
- source
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 210000000056 organ Anatomy 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19971185U JPS62110262U (enrdf_load_stackoverflow) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19971185U JPS62110262U (enrdf_load_stackoverflow) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62110262U true JPS62110262U (enrdf_load_stackoverflow) | 1987-07-14 |
Family
ID=31161589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19971185U Pending JPS62110262U (enrdf_load_stackoverflow) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62110262U (enrdf_load_stackoverflow) |
-
1985
- 1985-12-27 JP JP19971185U patent/JPS62110262U/ja active Pending
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