JPS62110262U - - Google Patents

Info

Publication number
JPS62110262U
JPS62110262U JP19971185U JP19971185U JPS62110262U JP S62110262 U JPS62110262 U JP S62110262U JP 19971185 U JP19971185 U JP 19971185U JP 19971185 U JP19971185 U JP 19971185U JP S62110262 U JPS62110262 U JP S62110262U
Authority
JP
Japan
Prior art keywords
evaporation
opening
openings
source
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19971185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19971185U priority Critical patent/JPS62110262U/ja
Publication of JPS62110262U publication Critical patent/JPS62110262U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP19971185U 1985-12-27 1985-12-27 Pending JPS62110262U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19971185U JPS62110262U (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19971185U JPS62110262U (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Publications (1)

Publication Number Publication Date
JPS62110262U true JPS62110262U (enrdf_load_stackoverflow) 1987-07-14

Family

ID=31161589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19971185U Pending JPS62110262U (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPS62110262U (enrdf_load_stackoverflow)

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