JPS62110260U - - Google Patents
Info
- Publication number
- JPS62110260U JPS62110260U JP1985200464U JP20046485U JPS62110260U JP S62110260 U JPS62110260 U JP S62110260U JP 1985200464 U JP1985200464 U JP 1985200464U JP 20046485 U JP20046485 U JP 20046485U JP S62110260 U JPS62110260 U JP S62110260U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- source material
- deposition source
- crucible
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985200464U JPS62110260U (enExample) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985200464U JPS62110260U (enExample) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62110260U true JPS62110260U (enExample) | 1987-07-14 |
Family
ID=31162994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985200464U Pending JPS62110260U (enExample) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62110260U (enExample) |
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1985
- 1985-12-27 JP JP1985200464U patent/JPS62110260U/ja active Pending