JPS62109464U - - Google Patents

Info

Publication number

JPS62109464U

JPS62109464U JP20155285U JP20155285U JPS62109464U JP S62109464 U JPS62109464 U JP S62109464U JP 20155285 U JP20155285 U JP 20155285U JP 20155285 U JP20155285 U JP 20155285U JP S62109464 U JPS62109464 U JP S62109464U

Authority

JP

Japan

Prior art keywords

diaphragm

pressure

strain gauge

detection device

view

Prior art date

1985-12-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 230000035882 stress Effects 0.000 description 2
• 230000008646 thermal stress Effects 0.000 description 2
• 238000009792 diffusion process Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 230000002093 peripheral effect Effects 0.000 description 1

Cited By (1)