JPS62109449U - - Google Patents

Info

Publication number
JPS62109449U
JPS62109449U JP19940685U JP19940685U JPS62109449U JP S62109449 U JPS62109449 U JP S62109449U JP 19940685 U JP19940685 U JP 19940685U JP 19940685 U JP19940685 U JP 19940685U JP S62109449 U JPS62109449 U JP S62109449U
Authority
JP
Japan
Prior art keywords
vacuum
ring
elastic body
microwaves
applies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19940685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447959Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985199406U priority Critical patent/JPH0447959Y2/ja
Publication of JPS62109449U publication Critical patent/JPS62109449U/ja
Application granted granted Critical
Publication of JPH0447959Y2 publication Critical patent/JPH0447959Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Drying Of Semiconductors (AREA)
JP1985199406U 1985-12-27 1985-12-27 Expired JPH0447959Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985199406U JPH0447959Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985199406U JPH0447959Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Publications (2)

Publication Number Publication Date
JPS62109449U true JPS62109449U (enrdf_load_stackoverflow) 1987-07-13
JPH0447959Y2 JPH0447959Y2 (enrdf_load_stackoverflow) 1992-11-12

Family

ID=31161000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985199406U Expired JPH0447959Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPH0447959Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58199529A (ja) * 1982-05-17 1983-11-19 Hitachi Ltd プラズマエツチング装置
JPS60207338A (ja) * 1984-03-09 1985-10-18 テーガル・コーポレーシヨン プラズマ反応装置チヤツク組立体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58199529A (ja) * 1982-05-17 1983-11-19 Hitachi Ltd プラズマエツチング装置
JPS60207338A (ja) * 1984-03-09 1985-10-18 テーガル・コーポレーシヨン プラズマ反応装置チヤツク組立体

Also Published As

Publication number Publication date
JPH0447959Y2 (enrdf_load_stackoverflow) 1992-11-12

Similar Documents

Publication Publication Date Title
JPS62109449U (enrdf_load_stackoverflow)
JPS62157086U (enrdf_load_stackoverflow)
JPH0220308U (enrdf_load_stackoverflow)
JPS61141274U (enrdf_load_stackoverflow)
JPS63102093U (enrdf_load_stackoverflow)
JPH0224521U (enrdf_load_stackoverflow)
JPS63152565U (enrdf_load_stackoverflow)
JPS62145313U (enrdf_load_stackoverflow)
JPH0224579U (enrdf_load_stackoverflow)
JPS63154004U (enrdf_load_stackoverflow)
JPS61195068U (enrdf_load_stackoverflow)
JPS6185153U (enrdf_load_stackoverflow)
JPS61176381U (enrdf_load_stackoverflow)
JPS6455722U (enrdf_load_stackoverflow)
JPS58136449U (ja) 密封容器
JPH01110438U (enrdf_load_stackoverflow)
JPS6243444U (enrdf_load_stackoverflow)
JPS61189561U (enrdf_load_stackoverflow)
JPS63167798U (enrdf_load_stackoverflow)
JPS62172151U (enrdf_load_stackoverflow)
JPS62159427U (enrdf_load_stackoverflow)
JPS6413059U (enrdf_load_stackoverflow)
JPS6227547U (enrdf_load_stackoverflow)
JPS61207057U (enrdf_load_stackoverflow)
JPS6420003U (enrdf_load_stackoverflow)