JPS62109443U - - Google Patents

Info

Publication number
JPS62109443U
JPS62109443U JP20292585U JP20292585U JPS62109443U JP S62109443 U JPS62109443 U JP S62109443U JP 20292585 U JP20292585 U JP 20292585U JP 20292585 U JP20292585 U JP 20292585U JP S62109443 U JPS62109443 U JP S62109443U
Authority
JP
Japan
Prior art keywords
process tube
fixing ring
sleeve
key
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20292585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220827Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20292585U priority Critical patent/JPH0220827Y2/ja
Publication of JPS62109443U publication Critical patent/JPS62109443U/ja
Application granted granted Critical
Publication of JPH0220827Y2 publication Critical patent/JPH0220827Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP20292585U 1985-12-27 1985-12-27 Expired JPH0220827Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20292585U JPH0220827Y2 (cg-RX-API-DMAC7.html) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20292585U JPH0220827Y2 (cg-RX-API-DMAC7.html) 1985-12-27 1985-12-27

Publications (2)

Publication Number Publication Date
JPS62109443U true JPS62109443U (cg-RX-API-DMAC7.html) 1987-07-13
JPH0220827Y2 JPH0220827Y2 (cg-RX-API-DMAC7.html) 1990-06-06

Family

ID=31167764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20292585U Expired JPH0220827Y2 (cg-RX-API-DMAC7.html) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPH0220827Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0220827Y2 (cg-RX-API-DMAC7.html) 1990-06-06

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