JPS62109443U - - Google Patents
Info
- Publication number
- JPS62109443U JPS62109443U JP20292585U JP20292585U JPS62109443U JP S62109443 U JPS62109443 U JP S62109443U JP 20292585 U JP20292585 U JP 20292585U JP 20292585 U JP20292585 U JP 20292585U JP S62109443 U JPS62109443 U JP S62109443U
- Authority
- JP
- Japan
- Prior art keywords
- process tube
- fixing ring
- sleeve
- key
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
Landscapes
- Furnace Details (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20292585U JPH0220827Y2 (OSRAM) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20292585U JPH0220827Y2 (OSRAM) | 1985-12-27 | 1985-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62109443U true JPS62109443U (OSRAM) | 1987-07-13 |
| JPH0220827Y2 JPH0220827Y2 (OSRAM) | 1990-06-06 |
Family
ID=31167764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20292585U Expired JPH0220827Y2 (OSRAM) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220827Y2 (OSRAM) |
-
1985
- 1985-12-27 JP JP20292585U patent/JPH0220827Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220827Y2 (OSRAM) | 1990-06-06 |