JPS62108943A - Control device for clean room - Google Patents

Control device for clean room

Info

Publication number
JPS62108943A
JPS62108943A JP60249342A JP24934285A JPS62108943A JP S62108943 A JPS62108943 A JP S62108943A JP 60249342 A JP60249342 A JP 60249342A JP 24934285 A JP24934285 A JP 24934285A JP S62108943 A JPS62108943 A JP S62108943A
Authority
JP
Japan
Prior art keywords
clean room
inverter
room
output
fan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60249342A
Other languages
Japanese (ja)
Inventor
Yasuhiro Moroi
諸井　康裕
Yuji Kano
狩野　雄司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Ecology Systems Co Ltd
Panasonic Holdings Corp
Original Assignee
Matsushita Seiko Co Ltd
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Seiko Co Ltd, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Seiko Co Ltd
Priority to JP60249342A priority Critical patent/JPS62108943A/en
Publication of JPS62108943A publication Critical patent/JPS62108943A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)

Abstract

PURPOSE:To keep always cleanliness and improve energy saving property by determining the output value of an inverter after the number of persons in a clean room is counted. CONSTITUTION:At the ceiling 2 of a clean room 1, a filter 3 with ultra high performance and an air supply duct 4 to which a circulating fan 5 is connected, air installed. A circulating duct 6 placed at the grating floor of the room 1 is connected with the fan 5 from the under-side of the duct. The relational expression of an output value which corresponds to the number of persons entering the room 1 and is transmitted to an inverter 8 is memorized in a decision means 10 for an output to the inverter. When the number of persons entering the room 1 is changed, the outer value to the inverter which indicates to take the minimum circulating air quantity based on the output signal from a counter 9 for persons entering the room 1 is calculated by the means 10. The rotating speed of the fan 5 is controlled on the basis of a calculated result from the means 10.

Description

【発明の詳細な説明】 産業上の利用分野 本光明は、半導体の製造などのため清浄空間をつくりだ
すクリーンルーム制御ｉｐ装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a clean room control IP device that creates a clean space for semiconductor manufacturing and the like.

従来の技術 近年、ＬＳＩの高密度化にともないクリーンルームの超
ｆＪか度空間か要求されている。またクリーンルーム運
転の省エネルギー性も製造原価低域のため非常に重要視
されている。BACKGROUND OF THE INVENTION In recent years, with the increasing density of LSIs, there has been a demand for clean rooms with ultra-fJ or degree space. Furthermore, the energy efficiency of clean room operation is also of great importance due to its low manufacturing costs.

このような従来のクリーンルームについて第２図を用い
て説明する。第２図にａｊいで、１はクリーンル−ムで
あり、このクリーンル−ム１の大月２には、超高性能の
フィルター３６よび給気ダクト４が設けられ、給気ダク
ト４の風上側には一定な回転数で運転される循環ファン
５が接ＨされＣいる。６は環気ダクトで、クリーンルー
ム１のグレーチング床７の下側から循環ノ１ン５に接続
されている。Such a conventional clean room will be explained using FIG. 2. In Fig. 2, 1 is a clean room, and the Otsuki 2 of this clean room 1 is equipped with an ultra-high performance filter 36 and an air supply duct 4. A circulation fan 5 operated at a constant rotation speed is connected to the upper side. Reference numeral 6 denotes a return air duct, which is connected to the circulation no. 1 5 from below the grating floor 7 of the clean room 1.

クリーンルーム１内の空気の大部分（よ、グレーチング
床７より環気ダクト６を通り、循環ファン５に向う。循
環ファン５を出た空気は、給気ダクト４を通り、超高Ｕ
能のフィルター３にて浄化された後、クリーンルーム１
内へ再廓供給される。Most of the air in the clean room 1 (from the grating floor 7 passes through the return air duct 6 and heads for the circulation fan 5.The air that exits the circulation fan 5 passes through the supply air duct 4 and reaches the ultra-high U
After being purified with Noh filter 3, clean room 1
Re-supplied to China.

このようにクリーンルーム１内の空気を循環）戸ン５に
て循環させることにより、ｒ＃！埃は超高性能のフィル
ター３にて除塵され、清浄反が維持されていた。In this way, by circulating the air in the clean room 1 through the door 5, r#! Dust was removed using an ultra-high-performance filter 3 to maintain cleanliness.

発明が解決しようとする問題点 しかしながら上記従来の構成では、循環ファン５の回転
数が一定であるため、クリーンルーム１内の清浄度に最
大の影響をもたらす入室もの変化に夕・１応できヂ、入
室者が多い場合には清浄度が管理限界から外れたり、ま
た入室者が少ない場合には必要以上の循環風量を循環フ
ァン５より送風することになり、省エネルギー性に問題
点を有していた。Problems to be Solved by the Invention However, in the above-mentioned conventional configuration, since the rotation speed of the circulation fan 5 is constant, it is possible to respond to changes in the number of people entering the clean room 1 that have the greatest effect on the cleanliness inside the clean room 1. When there are many people entering the room, the cleanliness level falls outside the control limits, and when there are few people entering the room, the circulation fan 5 sends out a larger amount of circulating air than necessary, which poses a problem in terms of energy saving. .

本発明は上記従来の問題点を解消するもので、常に清浄
度を維持しかつ省エネルギー性を向上させることのでき
るクリーンルーム制御Ｉ装置を提供することを目的とす
る。The present invention solves the above conventional problems, and aims to provide a clean room control device that can constantly maintain cleanliness and improve energy saving.

問題点を解決するための手段 上記問題点を解決するため、本発明のクリーンルーム制
御装置は、フィルターを介してクリーンルーム内の空気
を循環させる循環ファンと、この循環ファンの回転数を
制御するインバータと、前記クリーンルームの室内に入
室している人０数をカウントする入室者カウンターと、
この入室者カウンターからの出力信号により前記インバ
ータの出力値を決定するインバータ出力決定手段とを備
えた構成としたものである。Means for Solving the Problems In order to solve the above problems, the clean room control device of the present invention includes a circulation fan that circulates air in the clean room through a filter, and an inverter that controls the rotation speed of the circulation fan. , an entry counter for counting the number of people entering the clean room;
The apparatus further includes inverter output determining means for determining the output value of the inverter based on the output signal from the room entry counter.

作用 上記構成によれば、入室者カウンターは、クリーンルー
ム内に入室している人員数をカウントし、そのカウント
値をインバータ出力決定手段に出力する。インバータ出
力決定手段は、入室者カウンターからの信号により、ク
リーンルーム内の清浄度を維持するための最少量の循環
風量に対応する出力値を演算し、インバータに出力する
。循環ファンは、インバータからの出力にもとづいて、
清浄ｒＪ！維持に必要な最少循環風量を送風する。Effect: According to the above configuration, the room entry counter counts the number of people entering the clean room and outputs the count value to the inverter output determining means. The inverter output determining means calculates an output value corresponding to a minimum amount of circulating air volume for maintaining cleanliness in the clean room based on the signal from the room occupant counter, and outputs the output value to the inverter. Based on the output from the inverter, the circulation fan
Clean rJ! Blow the minimum amount of circulating air necessary for maintenance.

実施例 以下、本発明の一実施例を第１図に基づいて説明する。Example An embodiment of the present invention will be described below with reference to FIG.

第１図は本発明の一実施例におけるクリーンルーム制御
装置を採用したクリーンルームの構成図で、第２図に示
す構成要素と同一の構成要素には同一の符号を付してそ
の説明を省略する。第１図において、８はインバータ、
９は入室者カウンター、１０はインバータ出力決定手、
段である。前記インバータ８は、循環ファン５の回転数
を、インバータ８への入力信号に対応して変化させる。FIG. 1 is a block diagram of a clean room employing a clean room control device according to an embodiment of the present invention, and the same components as those shown in FIG. 2 are given the same reference numerals and their explanations will be omitted. In FIG. 1, 8 is an inverter;
9 is the person entering the room counter, 10 is the inverter output determining device,
It is a step. The inverter 8 changes the rotation speed of the circulation fan 5 in response to an input signal to the inverter 8.

前記入室者カウンター９は、クリーンルーム１に入室あ
るいは退室する人数をカウントすることにより、クリー
ンルーム１内に在室する人員数を演算し、信号としてイ
ンバータ出力決定手段１０に出力する。The occupant counter 9 calculates the number of people present in the clean room 1 by counting the number of people entering or leaving the clean room 1, and outputs the result as a signal to the inverter output determining means 10.

前記インバータ出力決定手段１０は、入室者カウンター
９からの信号にもとづいて、クリーンルーム１の清浄度
を維持する最少循環風量に対応する出力値を演算し、イ
ンバータ８に出υする。The inverter output determining means 10 calculates an output value corresponding to the minimum circulating air volume that maintains the cleanliness of the clean room 1 based on the signal from the occupant counter 9, and outputs it to the inverter 8.

クリーンルーム１への入室者の発１！！ｆｆｉは、１人
当り０．３μｍ以上の粒子で５０〜７５Ｘ１０５個／ｆ
ｔ３であり、クリーンルーム１の清浄度変化は入室者数
の増減にほぼ比例する。発ｆ！１ｆｆｉに対するクリー
ンルーム１の清浄度維持に必要な最少循環風量は、実験
的に求まるので、クリーンルーム１の入室者数に対する
循環ファン５のａｍ、つまりインバータ８の出力値が判
明する。Release of person entering clean room 1! ! ffi is 50 to 75 x 105 particles/f of particles larger than 0.3 μm per person.
t3, and the change in the cleanliness of the clean room 1 is approximately proportional to the increase or decrease in the number of people entering the room. Release f! Since the minimum circulating air volume required to maintain the cleanliness of the clean room 1 for 1ffi can be determined experimentally, the am of the circulation fan 5, that is, the output value of the inverter 8, for the number of people entering the clean room 1 is known.

そこで、クリーンルーム１の入室者数に対応するインバ
ータ８への出力値の関係式をインバータ出力決定手段１
０に記憶させておき、クリーンルーム１の入室者数が変
化した場合、入室者カウンター９からの出力信号にもと
づき最少循環風量となるインバータ８への出力値をイン
バータ出力決定手段１０にて演算させる。その演算結果
に従って、循環ファン５が回転数制御されるため、清浄
１豆に影響をおよぼすクリーンルーム１の入室者数変化
に対応して最少循環風量が循環ファン５にて送風される
。したがって、常に所定の清浄度が確保されると同時に
、省エネルギー化を図れる。Therefore, the inverter output determining means 1 calculates the relational expression of the output value to the inverter 8 corresponding to the number of people entering the clean room 1.
0, and when the number of people entering the clean room 1 changes, the output value to the inverter 8 that provides the minimum circulating air volume is calculated by an inverter output determining means 10 based on the output signal from the person counter 9. According to the calculation result, the rotation speed of the circulation fan 5 is controlled, so that the circulation fan 5 blows a minimum amount of air in response to a change in the number of people entering the clean room 1, which affects one clean bean. Therefore, a predetermined level of cleanliness is always ensured, and at the same time, energy savings can be achieved.

発明の効果 以上述べたごとく本発明によれば、クリーンルームへの
入室者数に応じて循環ファンの回転数を制御するように
したので、清ａ一度が管理限界外へ出ることを確実に防
止できると同時に、常に最少循環風量を送風するため省
エネルギー性の向上を図ることができる。Effects of the Invention As described above, according to the present invention, since the rotation speed of the circulation fan is controlled according to the number of people entering the clean room, it is possible to reliably prevent clean air from exceeding the control limits. At the same time, since the minimum circulating air volume is always blown, energy saving can be improved.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の一実施例におけるクリーンルーム制御
装置を採用したクリーンルームの構成図、第２図は従来
のクリーンルームの構成図である。 １・・・クリーンルーム、３・・・フィルター、５・・
・循環ファン、８・・・インバータ、９・・・入室者カ
ウンター、１０・・・インバータ出力決定手段代理人　
　　森　　本　　義　　弘 第１′？。 第２図FIG. 1 is a block diagram of a clean room employing a clean room control device according to an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional clean room. 1...Clean room, 3...Filter, 5...
・Circulation fan, 8...Inverter, 9...Enter counter, 10...Inverter output determining means agent
Yoshihiro Morimoto 1st? . Figure 2

Claims (1)

【特許請求の範囲】[Claims] １、フィルターを介してクリーンルーム内の空気を循環
させる循環ファンと、この循環ファンの回転数を制御す
るインバータと、前記クリーンルームの室内に入室して
いる人員数をカウントする入室者カウンターと、この入
室者カウンターからの出力信号により前記インバータの
出力値を決定するインバータ出力決定手段とを備えたク
リーンルーム制御装置。1. A circulation fan that circulates air in the clean room through a filter, an inverter that controls the rotation speed of this circulation fan, an entry counter that counts the number of people entering the clean room, and an entry counter for counting the number of people entering the clean room. and inverter output determining means for determining an output value of the inverter based on an output signal from an operator counter.
JP60249342A 1985-11-06 1985-11-06 Control device for clean room Pending JPS62108943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60249342A JPS62108943A (en) 1985-11-06 1985-11-06 Control device for clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60249342A JPS62108943A (en) 1985-11-06 1985-11-06 Control device for clean room

Publications (1)

Publication Number Publication Date
JPS62108943A true JPS62108943A (en) 1987-05-20

Family

ID=17191592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60249342A Pending JPS62108943A (en) 1985-11-06 1985-11-06 Control device for clean room

Country Status (1)

Country Link
JP (1) JPS62108943A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106839270A (en) * 2016-12-30 2017-06-13 安徽育安实验室装备有限公司 A kind of laboratory automation ventilated control system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106839270A (en) * 2016-12-30 2017-06-13 安徽育安实验室装备有限公司 A kind of laboratory automation ventilated control system

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