JPS62108439A - Field emission electron gun - Google Patents
Field emission electron gunInfo
- Publication number
- JPS62108439A JPS62108439A JP24762885A JP24762885A JPS62108439A JP S62108439 A JPS62108439 A JP S62108439A JP 24762885 A JP24762885 A JP 24762885A JP 24762885 A JP24762885 A JP 24762885A JP S62108439 A JPS62108439 A JP S62108439A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic field
- electron beam
- chip
- electromagnets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は電界放射形電子銃に係り、特に透過形電子顕微
鏡に最適な電界放射形電子銃に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a field emission type electron gun, and particularly to a field emission type electron gun most suitable for a transmission electron microscope.
従来、透過型電子類Ｗｉ鏡の電界放射形電子銃の構成は
、電子線を放出するＦＥチップ、電子線を引出すための
電圧Ｖｌを印加する部分と、電子線を加速する電圧Ｖｏ
を印加する加速管部とより成つており、これら全体をガ
ンハウジングに収納させている。Conventionally, the configuration of a field emission type electron gun of a transmission type Wi mirror includes an FE chip that emits an electron beam, a part that applies a voltage Vl to extract the electron beam, and a voltage Vo that accelerates the electron beam.
It consists of an accelerating tube section that applies the electric current, and the entire body is housed in the gun housing.
しかし、ＦＥチップとその他の部分の機械的軸調整が容
易なように配慮されていなかったため。However, no consideration was given to easy mechanical axis adjustment of the FE chip and other parts.
軸調整のために何度もガンハウジングを開ける繁雑な作
業を行なう必要があった。すなわち、第２図は従来の電
界放射形電子銃の立体断面図、であり。It was necessary to open the gun housing many times to adjust the shaft, which was a complicated process. That is, FIG. 2 is a three-dimensional cross-sectional view of a conventional field emission type electron gun.
第３図はその主要部の縦断面図である。１はエポキシ樹
脂等の絶縁物で製作されたガンハウジングである。この
中にＦＥチップ４と引出し電極６よりなる電子線放出部
と電子線を加速する部分、即ちｆｆｉ極６を含め、電極
７．７’ 、７’と絶縁体５゜５’ 、５’よりなる部
分がある。第２図に示すように高圧ケーブル２には加速
電圧ＶｏをＦＥチップ４と電極７′の間に印加するため
の芯線と、引出し電圧Ｖｒ をＦＥチップ４と電極６の
間に印加するための芯線が含まれている。電極間には加
速電圧Ｖｏを分割して印加するためのブリーダー抵抗１
１．１１’ 、１１′がある。なお、第３図１点１ＲＩ
ＩＡはガンハウジングを示す、ガンハウジング１と電界
放射形電子銃との間の空間３は高電圧絶縁を保つため数
気圧の絶縁ガス（たとえばフレオンガス、ＳＦｓ等で満
たされている。この状態でｖｌを印加し、ＦＥチップ４
に係る電界強度が電子線を引出すのに充分なものとなれ
ばＦＥチップ４の先端から電界放射により電子線が放出
され、電極６の孔１２を通って加速管部に電子線が流れ
込んでくる。ここで、加速電圧Ｖｏを加速管部に印加す
ると電子線は加速され、最終的にはＶｏのエネルギーを
持った電子線として加速管部を通過し１図示されてはい
ないが、電界放射形電子銃に接続される鏡体部へと進ん
でゆく。FIG. 3 is a longitudinal sectional view of the main part. 1 is a gun housing made of an insulating material such as epoxy resin. This includes the electron beam emitting part consisting of the FE chip 4 and the extraction electrode 6, the part that accelerates the electron beam, that is, the ffi pole 6, and the electrodes 7, 7', 7' and the insulators 5°5', 5'. There is a part. As shown in FIG. 2, the high voltage cable 2 includes a core wire for applying an accelerating voltage Vo between the FE chip 4 and the electrode 7', and a core wire for applying the extraction voltage Vr between the FE chip 4 and the electrode 6. Contains core wire. A bleeder resistor 1 is provided between the electrodes to divide and apply the acceleration voltage Vo.
There are 1.11' and 11'. In addition, Fig. 3 1 point 1 RI
IA indicates a gun housing. The space 3 between the gun housing 1 and the field emission type electron gun is filled with several atmospheres of insulating gas (for example, Freon gas, SFs, etc.) to maintain high voltage insulation. In this state, vl FE chip 4
When the electric field intensity becomes sufficient to extract the electron beam, the electron beam is emitted from the tip of the FE chip 4 by field emission, and the electron beam flows into the acceleration tube section through the hole 12 of the electrode 6. . Here, when an accelerating voltage Vo is applied to the accelerating tube section, the electron beam is accelerated and finally passes through the accelerating tube section as an electron beam with energy Vo. Proceed to the mirror body that is connected to the gun.
そこで問題とするところのものは、各電極に電圧が印加
されると、それぞれにレンズ作用を持ち。The problem here is that when a voltage is applied to each electrode, each electrode has a lens effect.
それらの軸がかならずしも一致しているとは限らないた
めに簡単には電子線が、後に接合された鏡体部の方へ進
行してこないことである。実際の軸３１ＪＩ！では、ガ
ンハウジング１内の絶縁ガスを大気圧まで減圧し、ネジ
１７を全て外してガンマハウジング１を取外すようにし
ている。大気中で。Because their axes do not necessarily coincide, the simple problem is that the electron beam does not proceed toward the mirror body that is later joined. Actual axis 31JI! Now, the insulating gas inside the gun housing 1 is reduced to atmospheric pressure, all the screws 17 are removed, and the gamma housing 1 is removed. in the atmosphere.
Ｖｌ を印加し、ネジ８．９（全部図示されていないが
それぞれ４分割で４本ずつある）を、１１１！整して電
子線が所望の位置に来るようにする。このとき。Apply Vl and tighten screws 8.9 (not all shown, but there are 4 pieces each divided into 4 pieces), 111! Adjust the electron beam so that it comes to the desired position. At this time.
ベローズ１ｏにより、電子銃内は真空に保たれたままＦ
Ｅチップ４は、電極６の孔１２に対し＠調整される。次
にＶｏをＯから徐々に増してゆき、電子線が所定の位置
からずれると同様にし−てネジ８．９で調整する。最初
のうちはＶｏを印加したままでもよいが１段々Ｖｏが高
くなると、 ｍ−７−、＊のずれる方向を見定めて、そ
れを補正するように。The bellows 1o keeps the inside of the electron gun in a vacuum.
The E-tip 4 is aligned with the hole 12 of the electrode 6. Next, gradually increase Vo from O, and if the electron beam deviates from the predetermined position, adjust it in the same way using screw 8.9. At first, Vo can be left applied, but as Vo gradually increases, determine the direction in which m-7-, * shifts and correct it.
一度ＶｏをＯＦＦにしてからネジ８．９で調整する。こ
れを大気圧で放電なしに印加可能な電圧（Ｖ ｏで約２
０ｋＶ）まで行う。後は、ガンハウジング１を取り付け
、ネジ１７を締付け、３に絶縁ガスを数気圧にまで満す
。しかる後ＶＬ を印加し、Ｖｏ を大気中で印加した
より高い電圧を印加してゆく。印加の過程で、電子線が
所定の位置から外れたら、その方向を見定めておいて、
Ｖｔ ＩＶｏ をＯＦＦにし、ガンハウジングを取り
外し、ネジ８，９でＶｏ印加の状態で電子線が所定の位
置に来ると思われる調整を行う。Ｖｏは透過電顕では数
百ｋＶであるため、最終加速電圧にまでＶｏを持って行
って、電子線が所定の位置にあるようにするためには、
前述の過程を数１０回繰返す必要がある。経験と感によ
りこの回数は減せることができるのであろうが、決して
容易な作業ではない。Turn Vo off once and adjust with screw 8.9. This is the voltage that can be applied without discharge at atmospheric pressure (approximately 2 V o
0kV). After that, attach the gun housing 1, tighten the screws 17, and fill the chamber 3 with insulating gas to several atmospheres. Thereafter, VL is applied, and Vo is applied at a higher voltage than that applied in the atmosphere. If the electron beam deviates from the specified position during the application process, determine its direction and
Turn off Vt IVo, remove the gun housing, and use screws 8 and 9 to make adjustments that will bring the electron beam to a predetermined position with Vo applied. Since Vo is several hundred kV in a transmission electron microscope, in order to bring Vo to the final accelerating voltage so that the electron beam is at a predetermined position,
It is necessary to repeat the above process several dozen times. It may be possible to reduce this number with experience and intuition, but it is by no means an easy task.
本発明の目的は軸調整の容易な電界型放射電子銃を提供
するにある。An object of the present invention is to provide a field type radiation electron gun whose axis can be easily adjusted.
透過形電子顕微鏡の加速電圧は１００ｋＶ以上と高いた
め、ｆｗ界梨型放射電子銃全体ガンハウジング内に収納
されているが、このガンハウジングを取り付けたまま、
磁界を利用してその外部から軸Ｗ７１４９！ｉｉができ
る構造とするようにしたものである。Since the accelerating voltage of a transmission electron microscope is as high as 100 kV or more, the entire fw Kairi-type radiation electron gun is housed inside the gun housing, but with this gun housing attached,
Axis W7149 from the outside using a magnetic field! The structure is such that ii can be achieved.
第１図は本発明による電界放射形電子銃の一実施例を示
す構成図である。第２図と同符号のものは同機能を有す
る。まず通常電子銃の電子線体は非常に細いため、外部
交流磁界の影響を受は易い。FIG. 1 is a block diagram showing an embodiment of a field emission type electron gun according to the present invention. Components with the same symbols as in FIG. 2 have the same functions. First, since the electron beam body of an electron gun is usually very thin, it is easily affected by external alternating magnetic fields.
従って、これを防ぐため、ｆｌＥ極６，７．７’ 、７
’等はパーマロイ等の磁性体で製作されているが。Therefore, in order to prevent this, flE poles 6, 7.7', 7
' etc. are made of magnetic materials such as permalloy.
この実施例では、電極６を非磁性のＳＵＳ材を用いる。In this embodiment, the electrode 6 is made of a non-magnetic SUS material.
１９．１９’は円筒状のパーマロイ棒を図のように成形
し磁極としたものである。１９゜１９′はスペーサー２
０に耐真空的に溶接、されており、加速管内は真空に保
持される。１７は円形ヨークであり、これに電磁石１８
．１８’ が取り付けられている。１８．１９．１９’
、１Ｂ’ 。19.19' is a cylindrical permalloy rod formed as a magnetic pole as shown in the figure. 19°19' is spacer 2
The inside of the accelerator tube is maintained in a vacuum. 17 is a circular yoke, to which an electromagnet 18 is attached.
．． 18' is attached. 18.19.19'
, 1B'.
１７で磁気回路が形成される。電磁石１８．１８’の極
性は、磁極１９．１９’で形成する磁界により、ＦＥチ
ップ４から数量される電子線を紙面上、左右に偏向でき
るようにする。図示されていないが、同様の磁気回路を
ヨーク１７を共通にして、紙面に垂直な方向にも設けで
ある。これにより、電磁石１８．１８’とこれに垂直な
１個の電磁石の強さを加減することにより、電子線を２
次元的に任意の方向に偏向させることができる。１８と
１９の１１７．１９’ と１８′の間にはガンハウジン
グの壁が存在するためその部分は磁気的にはギャップが
できて、磁界が発生するが、電子線からは遠い位置であ
るので、電子線の軸Ｗ整に支障をきたすようなことはな
い。A magnetic circuit is formed at 17. The polarity of the electromagnets 18, 18' is such that the electron beam emitted from the FE chip 4 can be deflected to the left or right on the paper by the magnetic field formed by the magnetic poles 19, 19'. Although not shown, a similar magnetic circuit is also provided in the direction perpendicular to the plane of the paper, using the yoke 17 in common. As a result, by adjusting the strength of the electromagnet 18, 18' and one electromagnet perpendicular to it, the electron beam can be
It can be deflected dimensionally in any direction. 18 and 19 117. Since there is a wall of the gun housing between 19' and 18', there is a magnetic gap in that part and a magnetic field is generated, but it is located far from the electron beam. , there is no problem in aligning the axis W of the electron beam.
以上説明したように本発明によれば、電子銃の軸調整に
おいて、ガンハウジングを付けたり外したりの手間がな
く、軸調整に要する時間は従来の数１０分の１ですみ、
その効率の向上は顕著である。As explained above, according to the present invention, when adjusting the axis of an electron gun, there is no need to attach or remove the gun housing, and the time required for axis adjustment is several tenths of that of the conventional one.
The improvement in efficiency is remarkable.
第１図は本発明による電界放射形電子銃の一実施例を示
す構成図、第２図は従来の電界放射形電子鏡の立体断面
図、第３図は第２図の主要部分の縦断面図に電気回路を
加えた図である。
１・・・ガンハウジング、２・・・高圧ケーブル５３・
・・空間、４・・・ＦＥチップ、５．５’ 、５’・・
・絶縁物。
６・・・引出し電極、７．７’ 、７’・・・電極、８
・・・ネジ、９・・・ネジ、１０・・・ベローズ、１１
．１１’ 。
１１１・・・ブリーダー抵抗、１２・・・孔、１３・・
・コンタクト、１４．１５・・・バネ、１６・・・コン
タクト、１７・・・ネジ、１８・・・絶縁体。FIG. 1 is a configuration diagram showing an embodiment of a field emission type electron gun according to the present invention, FIG. 2 is a three-dimensional sectional view of a conventional field emission type electron mirror, and FIG. 3 is a vertical cross section of the main part of FIG. 2. It is a diagram in which an electric circuit is added to the diagram. 1...Gun housing, 2...High voltage cable 53.
...Space, 4...FE chip, 5.5', 5'...
·Insulator. 6... Extraction electrode, 7.7', 7'... Electrode, 8
...Screw, 9...Screw, 10...Bellows, 11
．． 11'. 111... Bleeder resistance, 12... Hole, 13...
- Contact, 14.15... Spring, 16... Contact, 17... Screw, 18... Insulator.
Claims (1)
引出し電極、複数段の加速管と、引出し電圧、加速電圧
印加可能な構造を備えた電界放射形電子銃において、該
ＦＥチップの近傍に２次元的な磁界を加えるように磁極
を設け、該磁極の磁界を外部から加減することにより、
ＦＥチップから放出される電子線を２次元的に偏向可能
にしたことを特徴とする電界放射形電子銃。1. At least an FE chip inside the gun housing,
In a field emission type electron gun equipped with an extraction electrode, a plurality of stages of acceleration tubes, and a structure capable of applying an extraction voltage and an acceleration voltage, a magnetic pole is provided to apply a two-dimensional magnetic field near the FE chip, and the magnetic pole is By adjusting the magnetic field from the outside,
A field emission type electron gun characterized in that an electron beam emitted from an FE chip can be deflected two-dimensionally.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60247628A JPH0656744B2 (en) | 1985-11-05 | 1985-11-05 | Field emission electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60247628A JPH0656744B2 (en) | 1985-11-05 | 1985-11-05 | Field emission electron gun |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62108439A true JPS62108439A (en) | 1987-05-19 |
| JPH0656744B2 JPH0656744B2 (en) | 1994-07-27 |
Family
ID=17166335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60247628A Expired - Lifetime JPH0656744B2 (en) | 1985-11-05 | 1985-11-05 | Field emission electron gun |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0656744B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02113257U (en) * | 1988-05-24 | 1990-09-11 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5034461A (en) * | 1973-07-31 | 1975-04-02 |
-
1985
- 1985-11-05 JP JP60247628A patent/JPH0656744B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5034461A (en) * | 1973-07-31 | 1975-04-02 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02113257U (en) * | 1988-05-24 | 1990-09-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0656744B2 (en) | 1994-07-27 |
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