JPS62107449U - - Google Patents
Info
- Publication number
- JPS62107449U JPS62107449U JP19892185U JP19892185U JPS62107449U JP S62107449 U JPS62107449 U JP S62107449U JP 19892185 U JP19892185 U JP 19892185U JP 19892185 U JP19892185 U JP 19892185U JP S62107449 U JPS62107449 U JP S62107449U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- positioning device
- outer periphery
- transport path
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Registering Or Overturning Sheets (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19892185U JPS62107449U (de) | 1985-12-24 | 1985-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19892185U JPS62107449U (de) | 1985-12-24 | 1985-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62107449U true JPS62107449U (de) | 1987-07-09 |
Family
ID=31160063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19892185U Pending JPS62107449U (de) | 1985-12-24 | 1985-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62107449U (de) |
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1985
- 1985-12-24 JP JP19892185U patent/JPS62107449U/ja active Pending