JPS62106641U - - Google Patents

Info

Publication number
JPS62106641U
JPS62106641U JP19653185U JP19653185U JPS62106641U JP S62106641 U JPS62106641 U JP S62106641U JP 19653185 U JP19653185 U JP 19653185U JP 19653185 U JP19653185 U JP 19653185U JP S62106641 U JPS62106641 U JP S62106641U
Authority
JP
Japan
Prior art keywords
dust collection
section
dust
electrode plate
sterilization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19653185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0317948Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985196531U priority Critical patent/JPH0317948Y2/ja
Publication of JPS62106641U publication Critical patent/JPS62106641U/ja
Application granted granted Critical
Publication of JPH0317948Y2 publication Critical patent/JPH0317948Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrostatic Separation (AREA)
JP1985196531U 1985-12-23 1985-12-23 Expired JPH0317948Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985196531U JPH0317948Y2 (enExample) 1985-12-23 1985-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985196531U JPH0317948Y2 (enExample) 1985-12-23 1985-12-23

Publications (2)

Publication Number Publication Date
JPS62106641U true JPS62106641U (enExample) 1987-07-08
JPH0317948Y2 JPH0317948Y2 (enExample) 1991-04-16

Family

ID=31155438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985196531U Expired JPH0317948Y2 (enExample) 1985-12-23 1985-12-23

Country Status (1)

Country Link
JP (1) JPH0317948Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498034A (ja) * 1990-08-15 1992-03-30 Takasago Thermal Eng Co Ltd 半導体製造用クリーンルームの海塩粒子汚染防止方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958691A (enExample) * 1972-10-09 1974-06-06
JPS5438046U (enExample) * 1977-07-13 1979-03-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958691A (enExample) * 1972-10-09 1974-06-06
JPS5438046U (enExample) * 1977-07-13 1979-03-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498034A (ja) * 1990-08-15 1992-03-30 Takasago Thermal Eng Co Ltd 半導体製造用クリーンルームの海塩粒子汚染防止方法

Also Published As

Publication number Publication date
JPH0317948Y2 (enExample) 1991-04-16

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