JPS62106641U - - Google Patents

Info

Publication number
JPS62106641U
JPS62106641U JP19653185U JP19653185U JPS62106641U JP S62106641 U JPS62106641 U JP S62106641U JP 19653185 U JP19653185 U JP 19653185U JP 19653185 U JP19653185 U JP 19653185U JP S62106641 U JPS62106641 U JP S62106641U
Authority
JP
Japan
Prior art keywords
dust collection
section
dust
electrode plate
sterilization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19653185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0317948Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985196531U priority Critical patent/JPH0317948Y2/ja
Publication of JPS62106641U publication Critical patent/JPS62106641U/ja
Application granted granted Critical
Publication of JPH0317948Y2 publication Critical patent/JPH0317948Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrostatic Separation (AREA)
JP1985196531U 1985-12-23 1985-12-23 Expired JPH0317948Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985196531U JPH0317948Y2 (enrdf_load_stackoverflow) 1985-12-23 1985-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985196531U JPH0317948Y2 (enrdf_load_stackoverflow) 1985-12-23 1985-12-23

Publications (2)

Publication Number Publication Date
JPS62106641U true JPS62106641U (enrdf_load_stackoverflow) 1987-07-08
JPH0317948Y2 JPH0317948Y2 (enrdf_load_stackoverflow) 1991-04-16

Family

ID=31155438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985196531U Expired JPH0317948Y2 (enrdf_load_stackoverflow) 1985-12-23 1985-12-23

Country Status (1)

Country Link
JP (1) JPH0317948Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498034A (ja) * 1990-08-15 1992-03-30 Takasago Thermal Eng Co Ltd 半導体製造用クリーンルームの海塩粒子汚染防止方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958691A (enrdf_load_stackoverflow) * 1972-10-09 1974-06-06
JPS5438046U (enrdf_load_stackoverflow) * 1977-07-13 1979-03-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958691A (enrdf_load_stackoverflow) * 1972-10-09 1974-06-06
JPS5438046U (enrdf_load_stackoverflow) * 1977-07-13 1979-03-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498034A (ja) * 1990-08-15 1992-03-30 Takasago Thermal Eng Co Ltd 半導体製造用クリーンルームの海塩粒子汚染防止方法

Also Published As

Publication number Publication date
JPH0317948Y2 (enrdf_load_stackoverflow) 1991-04-16

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