JPS62106102U - - Google Patents

Info

Publication number

JPS62106102U

JPS62106102U JP19887585U JP19887585U JPS62106102U JP S62106102 U JPS62106102 U JP S62106102U JP 19887585 U JP19887585 U JP 19887585U JP 19887585 U JP19887585 U JP 19887585U JP S62106102 U JPS62106102 U JP S62106102U

Authority

JP

Japan

Prior art keywords

focus state

state detector

output

focus

reflective film

Prior art date

1985-12-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 230000003287 optical effect Effects 0.000 claims description 5
• 238000010586 diagram Methods 0.000 description 5
• 238000005259 measurement Methods 0.000 description 2
• 238000006073 displacement reaction Methods 0.000 description 1

Cited By (1)