JPS62105332U - - Google Patents
Info
- Publication number
- JPS62105332U JPS62105332U JP19787185U JP19787185U JPS62105332U JP S62105332 U JPS62105332 U JP S62105332U JP 19787185 U JP19787185 U JP 19787185U JP 19787185 U JP19787185 U JP 19787185U JP S62105332 U JPS62105332 U JP S62105332U
- Authority
- JP
- Japan
- Prior art keywords
- subchamber
- exhaust port
- exhaust
- state
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Characterised By The Charging Evacuation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19787185U JPS62105332U (de) | 1985-12-23 | 1985-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19787185U JPS62105332U (de) | 1985-12-23 | 1985-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62105332U true JPS62105332U (de) | 1987-07-04 |
Family
ID=31158033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19787185U Pending JPS62105332U (de) | 1985-12-23 | 1985-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62105332U (de) |
-
1985
- 1985-12-23 JP JP19787185U patent/JPS62105332U/ja active Pending