JPS62104889U - - Google Patents

Info

Publication number
JPS62104889U
JPS62104889U JP19510585U JP19510585U JPS62104889U JP S62104889 U JPS62104889 U JP S62104889U JP 19510585 U JP19510585 U JP 19510585U JP 19510585 U JP19510585 U JP 19510585U JP S62104889 U JPS62104889 U JP S62104889U
Authority
JP
Japan
Prior art keywords
inspection
micro
objects
suction device
inverting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19510585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19510585U priority Critical patent/JPS62104889U/ja
Publication of JPS62104889U publication Critical patent/JPS62104889U/ja
Pending legal-status Critical Current

Links

JP19510585U 1985-12-20 1985-12-20 Pending JPS62104889U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19510585U JPS62104889U (enrdf_load_stackoverflow) 1985-12-20 1985-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19510585U JPS62104889U (enrdf_load_stackoverflow) 1985-12-20 1985-12-20

Publications (1)

Publication Number Publication Date
JPS62104889U true JPS62104889U (enrdf_load_stackoverflow) 1987-07-04

Family

ID=31152688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19510585U Pending JPS62104889U (enrdf_load_stackoverflow) 1985-12-20 1985-12-20

Country Status (1)

Country Link
JP (1) JPS62104889U (enrdf_load_stackoverflow)

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