JPS62104443U - - Google Patents

Info

Publication number
JPS62104443U
JPS62104443U JP19785585U JP19785585U JPS62104443U JP S62104443 U JPS62104443 U JP S62104443U JP 19785585 U JP19785585 U JP 19785585U JP 19785585 U JP19785585 U JP 19785585U JP S62104443 U JPS62104443 U JP S62104443U
Authority
JP
Japan
Prior art keywords
wafer
attached
come
operating rod
alignment device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19785585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19785585U priority Critical patent/JPS62104443U/ja
Publication of JPS62104443U publication Critical patent/JPS62104443U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Automatic Assembly (AREA)
JP19785585U 1985-12-23 1985-12-23 Pending JPS62104443U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19785585U JPS62104443U (US07534539-20090519-C00280.png) 1985-12-23 1985-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19785585U JPS62104443U (US07534539-20090519-C00280.png) 1985-12-23 1985-12-23

Publications (1)

Publication Number Publication Date
JPS62104443U true JPS62104443U (US07534539-20090519-C00280.png) 1987-07-03

Family

ID=31158003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19785585U Pending JPS62104443U (US07534539-20090519-C00280.png) 1985-12-23 1985-12-23

Country Status (1)

Country Link
JP (1) JPS62104443U (US07534539-20090519-C00280.png)

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