JPS6210439U - - Google Patents
Info
- Publication number
- JPS6210439U JPS6210439U JP10049285U JP10049285U JPS6210439U JP S6210439 U JPS6210439 U JP S6210439U JP 10049285 U JP10049285 U JP 10049285U JP 10049285 U JP10049285 U JP 10049285U JP S6210439 U JPS6210439 U JP S6210439U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- dried
- sealing device
- turntable
- dehydrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10049285U JPS6210439U (en, 2012) | 1985-07-03 | 1985-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10049285U JPS6210439U (en, 2012) | 1985-07-03 | 1985-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6210439U true JPS6210439U (en, 2012) | 1987-01-22 |
Family
ID=30970367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10049285U Pending JPS6210439U (en, 2012) | 1985-07-03 | 1985-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6210439U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62182539U (en, 2012) * | 1986-05-09 | 1987-11-19 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6142919A (ja) * | 1984-08-01 | 1986-03-01 | エフエスアイ コーポレイシヨン | 基板処理機のためのラビリンスシール |
-
1985
- 1985-07-03 JP JP10049285U patent/JPS6210439U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6142919A (ja) * | 1984-08-01 | 1986-03-01 | エフエスアイ コーポレイシヨン | 基板処理機のためのラビリンスシール |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62182539U (en, 2012) * | 1986-05-09 | 1987-11-19 |