JPS62104151U - - Google Patents

Info

Publication number

JPS62104151U

JPS62104151U JP19510085U JP19510085U JPS62104151U JP S62104151 U JPS62104151 U JP S62104151U JP 19510085 U JP19510085 U JP 19510085U JP 19510085 U JP19510085 U JP 19510085U JP S62104151 U JPS62104151 U JP S62104151U

Authority

JP

Japan

Prior art keywords

humidity

protective film

sensing element

electrodes

sensitive film

Prior art date

1985-12-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000001681 protective effect Effects 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 2
• 238000001514 detection method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 239000003990 capacitor Substances 0.000 description 1
• 239000012528 membrane Substances 0.000 description 1