JPS62104132U - - Google Patents
Info
- Publication number
- JPS62104132U JPS62104132U JP19554785U JP19554785U JPS62104132U JP S62104132 U JPS62104132 U JP S62104132U JP 19554785 U JP19554785 U JP 19554785U JP 19554785 U JP19554785 U JP 19554785U JP S62104132 U JPS62104132 U JP S62104132U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- thermocouple
- acoustic wave
- surface acoustic
- wave element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19554785U JPS62104132U (is) | 1985-12-19 | 1985-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19554785U JPS62104132U (is) | 1985-12-19 | 1985-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62104132U true JPS62104132U (is) | 1987-07-02 |
Family
ID=31153535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19554785U Pending JPS62104132U (is) | 1985-12-19 | 1985-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62104132U (is) |
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1985
- 1985-12-19 JP JP19554785U patent/JPS62104132U/ja active Pending