JPS62104131U - - Google Patents
Info
- Publication number
- JPS62104131U JPS62104131U JP19554685U JP19554685U JPS62104131U JP S62104131 U JPS62104131 U JP S62104131U JP 19554685 U JP19554685 U JP 19554685U JP 19554685 U JP19554685 U JP 19554685U JP S62104131 U JPS62104131 U JP S62104131U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- acoustic wave
- surface acoustic
- wave element
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19554685U JPS62104131U (ko) | 1985-12-19 | 1985-12-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19554685U JPS62104131U (ko) | 1985-12-19 | 1985-12-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62104131U true JPS62104131U (ko) | 1987-07-02 |
Family
ID=31153533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19554685U Pending JPS62104131U (ko) | 1985-12-19 | 1985-12-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62104131U (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007256287A (ja) * | 2006-03-21 | 2007-10-04 | Radi Medical Systems Ab | 圧力センサ |
JP2009222589A (ja) * | 2008-03-17 | 2009-10-01 | Nissan Motor Co Ltd | 圧力センサおよびこれを備えた圧力測定装置 |
-
1985
- 1985-12-19 JP JP19554685U patent/JPS62104131U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007256287A (ja) * | 2006-03-21 | 2007-10-04 | Radi Medical Systems Ab | 圧力センサ |
JP2009222589A (ja) * | 2008-03-17 | 2009-10-01 | Nissan Motor Co Ltd | 圧力センサおよびこれを備えた圧力測定装置 |