【図面の簡単な説明】[Brief explanation of the drawing]
第１図Ａは本考案になる流量計の一実施例に取
付けられる環状板の平面図、第１図Ｂは第１図Ａ
における―線に沿う断面図、第１図Ｃは第１
図Ａにおける―線に沿う断面図、第２図は本
考案になる流量計の縦断面図、第３図は第２図に
適用された絞りの収納保持の状態を説明するため
の縦断面図、第４図は絞りを構成する複数の板の
組付け順序を説明するための斜視図、第５図は環
状板に形成された孔及び通路近傍を拡大して示す
平面図、第６図は従来の流量計に用いられていた
環状板に形成されていた孔及び通路近傍を拡大し
て示す平面図、第７図は通路の幅寸法をひとつの
孔の径寸法より大に選定した環状板を示す平面図
、第８図Ａは内面全体に渡り凹部を形成しこれを
通路とした構成の環状板を示す平面図、第８図Ｂ
は第８図Ａにおける―線に沿う断面図、第８
図Ｃは第８図Ａにおける―線に沿う断面図、
第９図Ａは中央孔近傍に補強部を形成した環状板
を示す平面図、第９図Ｂは第９図Ａにおける―
線に沿う断面図、第１０図Ａは中央孔近傍に補
強部を形成した環状板を示す平面図、第１０図Ｂ
は第１０図Ａにおける―線に沿う断面図、第
１１図Ａは環状板外周近傍に多数設けられる孔の
形状を正円形状以外の形状とした環状板を示す平
面図、第１１図Ｂは第１１図Ａにおける―線
に沿う断面図である。
１……熱式質量流量計、２……絞り、３……バ
イパス流路、４……センサ流路、６……保持部材
、１１，１２，１３，１７，１９，２２，２４，
２６……環状板、１１ａ，１２ａ，１３ａ……環
状溝、１１ｂ，１２ｂ，１３ｂ，２５……孔、１
１ｃ，１２ｃ，１３ｃ……中央孔、１１ｄ，１２
ｄ，１３ｄ，１８，２７……通路、２０……凹部
、２１，２３……補強部。
FIG. 1A is a plan view of an annular plate attached to an embodiment of the flowmeter according to the present invention, and FIG.
A cross-sectional view taken along the line C in FIG.
2 is a longitudinal sectional view of the flowmeter according to the present invention, and FIG. 3 is a longitudinal sectional view for explaining the state of storing and holding the throttle applied to Fig. 2. , FIG. 4 is a perspective view for explaining the assembly order of a plurality of plates constituting the diaphragm, FIG. 5 is an enlarged plan view showing the vicinity of the hole and passage formed in the annular plate, and FIG. A plan view showing an enlarged view of the vicinity of the holes and passages formed in an annular plate used in a conventional flow meter. Figure 7 shows an annular plate in which the width of the passage is selected to be larger than the diameter of one hole. 8A is a plan view showing an annular plate having a concave portion formed over the entire inner surface and using this as a passage, FIG. 8B
is a sectional view taken along line - in Figure 8A,
Figure C is a sectional view taken along line - in Figure 8A;
FIG. 9A is a plan view showing an annular plate with a reinforcing portion formed near the center hole, and FIG. 9B is the same as that in FIG. 9A.
10A is a cross-sectional view taken along the line; FIG. 10A is a plan view showing an annular plate with a reinforcing portion formed near the central hole; FIG. 10B is a cross-sectional view taken along the line;
10A is a sectional view taken along line - in FIG. 10A, FIG. 11A is a plan view showing an annular plate in which the shape of the many holes provided near the outer periphery of the annular plate is other than a perfect circular shape, and FIG. 11B is a plan view of the annular plate. FIG. 11 is a sectional view taken along the line - in FIG. 11A. DESCRIPTION OF SYMBOLS 1... Thermal mass flow meter, 2... Throttle, 3... Bypass channel, 4... Sensor channel, 6... Holding member, 11, 12, 13, 17, 19, 22, 24,
26... Annular plate, 11a, 12a, 13a... Annular groove, 11b, 12b, 13b, 25... Hole, 1
1c, 12c, 13c...center hole, 11d, 12
d, 13d, 18, 27...passage, 20...recess, 21, 23...reinforcement part.