JPS62103256U - - Google Patents
Info
- Publication number
- JPS62103256U JPS62103256U JP19356785U JP19356785U JPS62103256U JP S62103256 U JPS62103256 U JP S62103256U JP 19356785 U JP19356785 U JP 19356785U JP 19356785 U JP19356785 U JP 19356785U JP S62103256 U JPS62103256 U JP S62103256U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- sample
- plane
- moves
- direction perpendicular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19356785U JPS62103256U (el) | 1985-12-18 | 1985-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19356785U JPS62103256U (el) | 1985-12-18 | 1985-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62103256U true JPS62103256U (el) | 1987-07-01 |
Family
ID=31149707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19356785U Pending JPS62103256U (el) | 1985-12-18 | 1985-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62103256U (el) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0268609A (ja) * | 1988-09-05 | 1990-03-08 | Canon Inc | ステージ位置決め補正方法及び装置 |
| JPH05506959A (ja) * | 1990-10-22 | 1993-10-07 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | デユアル・モードｚステージ |
-
1985
- 1985-12-18 JP JP19356785U patent/JPS62103256U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0268609A (ja) * | 1988-09-05 | 1990-03-08 | Canon Inc | ステージ位置決め補正方法及び装置 |
| JPH05506959A (ja) * | 1990-10-22 | 1993-10-07 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | デユアル・モードｚステージ |
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