JPS62103249U - - Google Patents

Info

Publication number

JPS62103249U

JPS62103249U JP19435885U JP19435885U JPS62103249U JP S62103249 U JPS62103249 U JP S62103249U JP 19435885 U JP19435885 U JP 19435885U JP 19435885 U JP19435885 U JP 19435885U JP S62103249 U JPS62103249 U JP S62103249U

Authority

JP

Japan

Prior art keywords

electrode

dry etching

substrate

etched

close contact

Prior art date

1985-12-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001312 dry etching Methods 0.000 claims description 3
• 239000000463 material Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims 2
• 238000001816 cooling Methods 0.000 claims 1
• 239000000498 cooling water Substances 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 238000005057 refrigeration Methods 0.000 description 1