JPS62103246U - - Google Patents

Info

Publication number
JPS62103246U
JPS62103246U JP19354085U JP19354085U JPS62103246U JP S62103246 U JPS62103246 U JP S62103246U JP 19354085 U JP19354085 U JP 19354085U JP 19354085 U JP19354085 U JP 19354085U JP S62103246 U JPS62103246 U JP S62103246U
Authority
JP
Japan
Prior art keywords
substrate
support
groove
support rods
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19354085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19354085U priority Critical patent/JPS62103246U/ja
Publication of JPS62103246U publication Critical patent/JPS62103246U/ja
Pending legal-status Critical Current

Links

JP19354085U 1985-12-18 1985-12-18 Pending JPS62103246U (US20020095090A1-20020718-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19354085U JPS62103246U (US20020095090A1-20020718-M00002.png) 1985-12-18 1985-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19354085U JPS62103246U (US20020095090A1-20020718-M00002.png) 1985-12-18 1985-12-18

Publications (1)

Publication Number Publication Date
JPS62103246U true JPS62103246U (US20020095090A1-20020718-M00002.png) 1987-07-01

Family

ID=31149655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19354085U Pending JPS62103246U (US20020095090A1-20020718-M00002.png) 1985-12-18 1985-12-18

Country Status (1)

Country Link
JP (1) JPS62103246U (US20020095090A1-20020718-M00002.png)

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