JPS62102864U - - Google Patents
Info
- Publication number
- JPS62102864U JPS62102864U JP19633185U JP19633185U JPS62102864U JP S62102864 U JPS62102864 U JP S62102864U JP 19633185 U JP19633185 U JP 19633185U JP 19633185 U JP19633185 U JP 19633185U JP S62102864 U JPS62102864 U JP S62102864U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- stage side
- passage
- opening
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19633185U JPH027268Y2 (https=) | 1985-12-20 | 1985-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19633185U JPH027268Y2 (https=) | 1985-12-20 | 1985-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62102864U true JPS62102864U (https=) | 1987-06-30 |
| JPH027268Y2 JPH027268Y2 (https=) | 1990-02-21 |
Family
ID=31155056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19633185U Expired JPH027268Y2 (https=) | 1985-12-20 | 1985-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH027268Y2 (https=) |
-
1985
- 1985-12-20 JP JP19633185U patent/JPH027268Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH027268Y2 (https=) | 1990-02-21 |