JPS62102255U - - Google Patents

Info

Publication number
JPS62102255U
JPS62102255U JP19483685U JP19483685U JPS62102255U JP S62102255 U JPS62102255 U JP S62102255U JP 19483685 U JP19483685 U JP 19483685U JP 19483685 U JP19483685 U JP 19483685U JP S62102255 U JPS62102255 U JP S62102255U
Authority
JP
Japan
Prior art keywords
ion implantation
condition
implantation conditions
control signal
storage means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19483685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19483685U priority Critical patent/JPS62102255U/ja
Publication of JPS62102255U publication Critical patent/JPS62102255U/ja
Pending legal-status Critical Current

Links

JP19483685U 1985-12-17 1985-12-17 Pending JPS62102255U (US07754267-20100713-C00017.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19483685U JPS62102255U (US07754267-20100713-C00017.png) 1985-12-17 1985-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19483685U JPS62102255U (US07754267-20100713-C00017.png) 1985-12-17 1985-12-17

Publications (1)

Publication Number Publication Date
JPS62102255U true JPS62102255U (US07754267-20100713-C00017.png) 1987-06-29

Family

ID=31152178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19483685U Pending JPS62102255U (US07754267-20100713-C00017.png) 1985-12-17 1985-12-17

Country Status (1)

Country Link
JP (1) JPS62102255U (US07754267-20100713-C00017.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector
JPS60187017A (ja) * 1984-03-07 1985-09-24 Hitachi Ltd イオン打込み装置
JPS62117247A (ja) * 1985-11-18 1987-05-28 Tokyo Electron Ltd イオン注入方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector
JPS60187017A (ja) * 1984-03-07 1985-09-24 Hitachi Ltd イオン打込み装置
JPS62117247A (ja) * 1985-11-18 1987-05-28 Tokyo Electron Ltd イオン注入方法

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