JPS62102111U

JPS62102111U -

Info

Publication number: JPS62102111U
Application number: JP19546985U
Authority: JP
Priority date: 1985-12-18
Filing date: 1985-12-18
Publication date: 1987-06-29

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例を示す斜視図、第２
図は従来の一例を示す斜視図である。１……被測定物（円板）、２……円板テーブル
、３……高さ固定ローラー、４……回転保持ロー
ラー、５……動力伝達ローラー、６……モーター
、７……スタンド、８……非接触変位計プローブ
、９……非接触変位計本体、１０……垂直移動ス
テージ、１１……平行移動ステージ、１２……テ
ーブル、１３……チヤツク。 Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a perspective view showing a conventional example. 1... Object to be measured (disc), 2... Disc table, 3... Fixed height roller, 4... Rotation holding roller, 5... Power transmission roller, 6... Motor, 7... Stand, 8...Non-contact displacement meter probe, 9...Non-contact displacement meter body, 10...Vertical movement stage, 11...Parallel movement stage, 12...Table, 13...Chick.

Claims

[Scope of utility model registration request]

A disc table with a hole in the center, rollers that insert the disc table from the top and bottom surfaces at three places to fix the height horizontally, rollers that support the outer periphery of the disc table at three points, and the disc table. a rotating means that includes a roller that transmits rotational power to the outer periphery of the disc table by friction, a motor that rotates the roller, and a stand that supports the roller;
A non-contact displacement meter probe is set perpendicularly to the disk table at the position of the hole in the circular table, with its upper and lower surfaces facing each other, and a non-contact displacement meter is connected to the non-contact displacement meter probe by a cable. A plate thickness characterized by including a stage that moves the gauge body and the non-contact displacement meter probe perpendicularly to the disc table, and a stage that moves the non-contact displacement gauge probe parallel to the disc table. Inner circumference measurement mechanism.