JPS62102106U - - Google Patents

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Publication number
JPS62102106U
JPS62102106U JP19301385U JP19301385U JPS62102106U JP S62102106 U JPS62102106 U JP S62102106U JP 19301385 U JP19301385 U JP 19301385U JP 19301385 U JP19301385 U JP 19301385U JP S62102106 U JPS62102106 U JP S62102106U
Authority
JP
Japan
Prior art keywords
measured
stylus
wedge
roughness meter
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19301385U
Other languages
Japanese (ja)
Other versions
JPH0435761Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19301385U priority Critical patent/JPH0435761Y2/ja
Publication of JPS62102106U publication Critical patent/JPS62102106U/ja
Application granted granted Critical
Publication of JPH0435761Y2 publication Critical patent/JPH0435761Y2/ja
Expired legal-status Critical Current

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  • A Measuring Device Byusing Mechanical Method (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に用いるナイフウエツジ型触針
の一例を示す拡大図、第２図は本考案の表面粗さ
計の一例を示す側面図、第３図は薄膜状物の表面
状を検査するために張り付けるに適した治具を示
す表面図と断面図である。 １……触針、２……ナイフウエツジ。 Figure 1 is an enlarged view showing an example of a knife wedge type stylus used in the present invention, Figure 2 is a side view showing an example of a surface roughness meter of the present invention, and Figure 3 is for inspecting the surface condition of a thin film-like object. FIG. 4 is a surface view and a cross-sectional view showing a jig suitable for pasting. 1... Stylus, 2... Knife wedge.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被測定面上を触針ですり動かし、表面の凹凸を
測定する平面粗さ計において、触針として、横幅
が０．０５〜２mm、真直度が±０．５μｍ以内の
ナイフウエツジ型触針を、被測定面に垂直度±０
．５μｍで接触させ、かつ被測定面上で該ウエツ
ジの幅方向と直角方向に移動可能に装着したこと
を特徴とする平面粗さ計。 In a surface roughness meter that measures surface irregularities by sliding a stylus over the surface to be measured, a knife-wedge type stylus with a width of 0.05 to 2 mm and a straightness of within ±0.5 μm is used as the stylus. Perpendicularity to the surface to be measured ±0
．． A plane roughness meter, characterized in that the wedge is brought into contact at a distance of 5 μm and is movably mounted on the surface to be measured in a direction perpendicular to the width direction of the wedge.
JP19301385U 1985-12-17 1985-12-17 Expired JPH0435761Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19301385U JPH0435761Y2 (en) 1985-12-17 1985-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19301385U JPH0435761Y2 (en) 1985-12-17 1985-12-17

Publications (2)

Publication Number Publication Date
JPS62102106U true JPS62102106U (en) 1987-06-29
JPH0435761Y2 JPH0435761Y2 (en) 1992-08-25

Family

ID=31148635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19301385U Expired JPH0435761Y2 (en) 1985-12-17 1985-12-17

Country Status (1)

Country Link
JP (1) JPH0435761Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450701A (en) * 1990-06-19 1992-02-19 Ngk Insulators Ltd Surface roughness measuring method for honeycomb and measuring prove used for same
JP2004177192A (en) * 2002-11-26 2004-06-24 Dainippon Printing Co Ltd Inspection device for defective height and inspection method for defective height

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0450701A (en) * 1990-06-19 1992-02-19 Ngk Insulators Ltd Surface roughness measuring method for honeycomb and measuring prove used for same
JP2004177192A (en) * 2002-11-26 2004-06-24 Dainippon Printing Co Ltd Inspection device for defective height and inspection method for defective height

Also Published As

Publication number Publication date
JPH0435761Y2 (en) 1992-08-25

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