JPS62101557U - - Google Patents
Info
- Publication number
- JPS62101557U JPS62101557U JP19222285U JP19222285U JPS62101557U JP S62101557 U JPS62101557 U JP S62101557U JP 19222285 U JP19222285 U JP 19222285U JP 19222285 U JP19222285 U JP 19222285U JP S62101557 U JPS62101557 U JP S62101557U
- Authority
- JP
- Japan
- Prior art keywords
- floor
- gas outlet
- concave portion
- attached
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920004449 Halon® Polymers 0.000 claims description 3
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 238000004080 punching Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19222285U JPS62101557U ( ) | 1985-12-16 | 1985-12-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19222285U JPS62101557U ( ) | 1985-12-16 | 1985-12-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62101557U true JPS62101557U ( ) | 1987-06-27 |
Family
ID=31147095
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19222285U Pending JPS62101557U ( ) | 1985-12-16 | 1985-12-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62101557U ( ) |
-
1985
- 1985-12-16 JP JP19222285U patent/JPS62101557U/ja active Pending