JPS62101232U - - Google Patents
Info
- Publication number
- JPS62101232U JPS62101232U JP19372885U JP19372885U JPS62101232U JP S62101232 U JPS62101232 U JP S62101232U JP 19372885 U JP19372885 U JP 19372885U JP 19372885 U JP19372885 U JP 19372885U JP S62101232 U JPS62101232 U JP S62101232U
- Authority
- JP
- Japan
- Prior art keywords
- amount
- adjusts
- imaging
- variable
- inspection apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003384 imaging method Methods 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19372885U JPH0534105Y2 (enExample) | 1985-12-17 | 1985-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19372885U JPH0534105Y2 (enExample) | 1985-12-17 | 1985-12-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62101232U true JPS62101232U (enExample) | 1987-06-27 |
| JPH0534105Y2 JPH0534105Y2 (enExample) | 1993-08-30 |
Family
ID=31150024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19372885U Expired - Lifetime JPH0534105Y2 (enExample) | 1985-12-17 | 1985-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534105Y2 (enExample) |
-
1985
- 1985-12-17 JP JP19372885U patent/JPH0534105Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0534105Y2 (enExample) | 1993-08-30 |