JPS62101232U - - Google Patents

Info

Publication number
JPS62101232U
JPS62101232U JP19372885U JP19372885U JPS62101232U JP S62101232 U JPS62101232 U JP S62101232U JP 19372885 U JP19372885 U JP 19372885U JP 19372885 U JP19372885 U JP 19372885U JP S62101232 U JPS62101232 U JP S62101232U
Authority
JP
Japan
Prior art keywords
amount
adjusts
imaging
variable
inspection apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19372885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0534105Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19372885U priority Critical patent/JPH0534105Y2/ja
Publication of JPS62101232U publication Critical patent/JPS62101232U/ja
Application granted granted Critical
Publication of JPH0534105Y2 publication Critical patent/JPH0534105Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP19372885U 1985-12-17 1985-12-17 Expired - Lifetime JPH0534105Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19372885U JPH0534105Y2 (enrdf_load_stackoverflow) 1985-12-17 1985-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19372885U JPH0534105Y2 (enrdf_load_stackoverflow) 1985-12-17 1985-12-17

Publications (2)

Publication Number Publication Date
JPS62101232U true JPS62101232U (enrdf_load_stackoverflow) 1987-06-27
JPH0534105Y2 JPH0534105Y2 (enrdf_load_stackoverflow) 1993-08-30

Family

ID=31150024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19372885U Expired - Lifetime JPH0534105Y2 (enrdf_load_stackoverflow) 1985-12-17 1985-12-17

Country Status (1)

Country Link
JP (1) JPH0534105Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0534105Y2 (enrdf_load_stackoverflow) 1993-08-30

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