JPS62101231U - - Google Patents
Info
- Publication number
- JPS62101231U JPS62101231U JP19345685U JP19345685U JPS62101231U JP S62101231 U JPS62101231 U JP S62101231U JP 19345685 U JP19345685 U JP 19345685U JP 19345685 U JP19345685 U JP 19345685U JP S62101231 U JPS62101231 U JP S62101231U
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- lift
- jig
- wafer
- ultrasonic vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003960 organic solvent Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19345685U JPS62101231U (enExample) | 1985-12-18 | 1985-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19345685U JPS62101231U (enExample) | 1985-12-18 | 1985-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62101231U true JPS62101231U (enExample) | 1987-06-27 |
Family
ID=31149492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19345685U Pending JPS62101231U (enExample) | 1985-12-18 | 1985-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62101231U (enExample) |
-
1985
- 1985-12-18 JP JP19345685U patent/JPS62101231U/ja active Pending
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