JPS6210090U - - Google Patents
Info
- Publication number
- JPS6210090U JPS6210090U JP9961685U JP9961685U JPS6210090U JP S6210090 U JPS6210090 U JP S6210090U JP 9961685 U JP9961685 U JP 9961685U JP 9961685 U JP9961685 U JP 9961685U JP S6210090 U JPS6210090 U JP S6210090U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning tank
- shaped
- shaped electrodes
- electrodes
- comb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 3
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985099616U JPH0334317Y2 (US07935154-20110503-C00006.png) | 1985-06-30 | 1985-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985099616U JPH0334317Y2 (US07935154-20110503-C00006.png) | 1985-06-30 | 1985-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6210090U true JPS6210090U (US07935154-20110503-C00006.png) | 1987-01-21 |
| JPH0334317Y2 JPH0334317Y2 (US07935154-20110503-C00006.png) | 1991-07-19 |
Family
ID=30968658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985099616U Expired JPH0334317Y2 (US07935154-20110503-C00006.png) | 1985-06-30 | 1985-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334317Y2 (US07935154-20110503-C00006.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019153638A (ja) * | 2018-03-01 | 2019-09-12 | 株式会社国際電気セミコンダクターサービス | 超音波洗浄装置、洗浄方法および振動子 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56102977A (en) * | 1980-01-19 | 1981-08-17 | Matsushita Electric Ind Co Ltd | Ultrasonic washer |
| JPS56141888A (en) * | 1980-04-09 | 1981-11-05 | Shimada Rika Kogyo Kk | Ultrasonic washing device |
| JPS5842968A (ja) * | 1981-09-07 | 1983-03-12 | Hitachi Ltd | 超音波探触子 |
| JPS60111387A (ja) * | 1983-11-21 | 1985-06-17 | Hitachi Ltd | 磁気バブルメモリ素子 |
-
1985
- 1985-06-30 JP JP1985099616U patent/JPH0334317Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56102977A (en) * | 1980-01-19 | 1981-08-17 | Matsushita Electric Ind Co Ltd | Ultrasonic washer |
| JPS56141888A (en) * | 1980-04-09 | 1981-11-05 | Shimada Rika Kogyo Kk | Ultrasonic washing device |
| JPS5842968A (ja) * | 1981-09-07 | 1983-03-12 | Hitachi Ltd | 超音波探触子 |
| JPS60111387A (ja) * | 1983-11-21 | 1985-06-17 | Hitachi Ltd | 磁気バブルメモリ素子 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019153638A (ja) * | 2018-03-01 | 2019-09-12 | 株式会社国際電気セミコンダクターサービス | 超音波洗浄装置、洗浄方法および振動子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0334317Y2 (US07935154-20110503-C00006.png) | 1991-07-19 |
