JPS6199790A - All-metal ultra-high vacuum joint - Google Patents
All-metal ultra-high vacuum jointInfo
- Publication number
- JPS6199790A JPS6199790A JP21852084A JP21852084A JPS6199790A JP S6199790 A JPS6199790 A JP S6199790A JP 21852084 A JP21852084 A JP 21852084A JP 21852084 A JP21852084 A JP 21852084A JP S6199790 A JPS6199790 A JP S6199790A
- Authority
- JP
- Japan
- Prior art keywords
- fitting
- wedge
- tube
- high vacuum
- aluminum alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Joints With Pressure Members (AREA)
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は超高真空管路に用いられるオールメタル超高
真空継手に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] This invention relates to an all-metal ultra-high vacuum joint used in an ultra-high vacuum pipeline.
従来、水圧機器や空気圧機器に用いられるアルミニウム
合金からなるオールメタル継手として、中空のねじ金具
の一端部に管体を挿入し、かつねじ金具の一端部のテー
パー孔と管体と゛の間に楔状カラーを嵌入すると共に、
その楔状カラーの厚肉端部に環状ベース金具を係合し、
前記ねじ金具の一端部に螺合した内側フランジ付きナツ
トにより環状ベース金具を介して楔状カラーを管体とね
じ金具のテーパー孔との間に圧入した構造のものが知ら
れている。Conventionally, as an all-metal joint made of aluminum alloy used for water pressure equipment and pneumatic equipment, a pipe body is inserted into one end of a hollow threaded fitting, and a wedge-shaped collar is inserted between the tapered hole at one end of the threaded fitting and the pipe body. In addition to inserting
Engaging the annular base metal fitting with the thick end of the wedge-shaped collar,
A structure is known in which a wedge-shaped collar is press-fitted between the tubular body and the tapered hole of the threaded metal fitting via an annular base metal fitting by means of an inner flange nut screwed onto one end of the threaded metal fitting.
そしてこの構造のオールメタル継手の表面には、流体等
による腐食を防止するために、アルマイト処理によるク
ロム酸皮膜または硫酸皮膜を設けている。これらの皮膜
はポーラスでかつ水利皮膜であるので、空気圧、水圧等
に対するシール性能は充分であるが、真空として特に超
高真空としてのベーキングによる水分の蒸発によって皮
膜のポーラス状シール面よシのリークが発生するという
問題があり、また超高真空では前記皮膜からガスが放出
されるという問題がある。The surface of the all-metal joint of this structure is provided with a chromic acid film or a sulfuric acid film by alumite treatment in order to prevent corrosion due to fluids and the like. Since these films are porous and water-conserving films, their sealing performance against air pressure, water pressure, etc. is sufficient, but leakage occurs from the porous sealing surface of the film due to evaporation of moisture due to baking in a vacuum, especially an ultra-high vacuum. There is a problem that gas is generated, and there is also a problem that gas is released from the film in an ultra-high vacuum.
一方、シール部の材質については、ねじ金具および楔状
カラーの双方を同一材質にすると、シール性能として１
回のシールには有効であるが、繰返しシール性能は不完
全であるので、通常は、ねじ金具として、ＪＩＳ、Ａ７
０７５のようにアルミニウム合金の中でも比較的硬質の
ものを使用している。On the other hand, regarding the material of the seal part, if both the screw fitting and the wedge-shaped collar are made of the same material, the sealing performance will be 1.
Although it is effective for repeated sealing, the repeated sealing performance is incomplete, so it is usually used as a screw fitting according to JIS, A7
A relatively hard aluminum alloy such as 075 is used.
ねじ金具を前記Ａ７０７５により製作した場合、Ａ７０
７５の耐食性は他のアルミニウム合金に比べて劣り、か
つＡ７０７５はＺｎ′５ｃ含有しておシ、超高真空にお
いてはＺｎのガスが放出されるので、超高真空継手のね
じ金具に前記Ａ７０７５’に使用するのは不適当である
。When the screw fitting is manufactured using the above A7075, A70
The corrosion resistance of A75 is inferior to other aluminum alloys, and A7075 contains Zn'5c, and Zn gas is released in ultra-high vacuum. It is inappropriate to use it for
またねじ金具を他の材質例えばステンレスのような異種
材質にすることも考えられるが、この場合は、ねじ金具
と他の部材との線膨張係数が異なるので、常温（一定温
度）ではシール性を有するが、急激な温度変化において
はシール性能が低下する。It is also possible to use a different material for the threaded fittings, such as stainless steel, but in this case, the linear expansion coefficients of the threaded fittings and other parts are different, so the sealing performance at room temperature (constant temperature) will be poor. However, the sealing performance deteriorates under sudden temperature changes.
この発明は前述の問題を有利に解決できるオールメタル
超高真空継手を提供することを目的とするものであって
、この発明の要旨とするところは、アルミニウム合金の
ねじ金具１に設けられた管体嵌合孔２に管体６の端部が
嵌入され、その管体６の外周面とねじ金具１のテーパー
孔４との間にアルミニウム合金の楔状カラー５が嵌入さ
れ、ねじ金具１に螺合された内側フランジ付きナツト６
により環状ベース金具７を介して楔状カラー５が締付け
られているオールメタル継手において、前記ねじ金具１
の内面に、イオンブレーティング処理による窒化チタン
または窒化クロムの硬質皮膜８が設けられ、かつ前記楔
状カラー５の材質が、ねじ金具１．管体６および環状ベ
ース金具７よシも軟質であることを特徴とするオールメ
タル超高真空継手にある。The purpose of this invention is to provide an all-metal ultra-high vacuum joint that can advantageously solve the above-mentioned problems. The end of the tubular body 6 is fitted into the body fitting hole 2, and an aluminum alloy wedge-shaped collar 5 is fitted between the outer peripheral surface of the tubular body 6 and the tapered hole 4 of the screw fitting 1, and is screwed onto the screw fitting 1. Nut with fitted inner flange 6
In the all-metal joint in which the wedge-shaped collar 5 is tightened via the annular base metal fitting 7, the threaded metal fitting 1
A hard coating 8 of titanium nitride or chromium nitride is provided on the inner surface of the screw fitting 1 by ion-blating treatment, and the material of the wedge-shaped collar 5 is the same as that of the screw fitting 1. The all-metal ultra-high vacuum joint is characterized in that the pipe body 6 and the annular base metal fitting 7 are also soft.
次にこの発明を図示の例によって詳細に説明する。 Next, the present invention will be explained in detail using illustrated examples.
図面はこの発明の実施例を示すものであって、一端部に
ナツト螺合用雄ねじ９と管体嵌合孔２とその管体嵌合孔
２に連続するテーパー孔４とを備えかつ他端部に継手連
結用雄ねじ１０を備えている中空のねじ金具１が、ＪＩ
Ｓ、Ａ２２１９−Ｔａ２のような高強度のアルミニウム
合金により製作され、は、イオンブレーティング処理に
より３〜１０μの厚さの窒化チタンまたは窒化クロムの
硬質皮膜８が一体に設けられている。The drawing shows an embodiment of the present invention, which has a nut screwing male screw 9 at one end, a tube fitting hole 2, and a tapered hole 4 continuous to the tube fitting hole 2, and the other end. A hollow screw fitting 1 equipped with a male thread 10 for connecting a joint is JI
It is made of a high-strength aluminum alloy such as S, A2219-Ta2, and is integrally provided with a hard coating 8 of titanium nitride or chromium nitride with a thickness of 3 to 10 μm by ion-blating treatment.
前記管体嵌合孔２にアルミニウム合金の管体３の端部が
嵌入され、かつアルミニウム合金からなる楔状カラー５
は前記テーパー孔４と管体６との間に嵌入され、その楔
状カラー５の厚肉端部にはアルミニウム合金の環状ベー
ス金具７が係合され、さらにアルミニウム合金からなる
内側フランジ付きナツト６はねじ金具１におけるナツト
螺合用雄ねじ９に螺合され、その内側フランジ付きナツ
ト乙の締付力により環状ベース金具７を介して楔状カラ
ー５が押圧されて前記テーパー孔４と管体６との間に強
力に圧入され、また楔状カラー５の厚肉端部は環状ベー
ス金具７により押し拡げられて内側７ランジ付きナツト
乙の内面に押付けられている。An end of an aluminum alloy tube 3 is fitted into the tube fitting hole 2, and a wedge-shaped collar 5 made of aluminum alloy is fitted.
is fitted between the tapered hole 4 and the tube body 6, an annular base fitting 7 made of aluminum alloy is engaged with the thick end of the wedge-shaped collar 5, and an inner flange nut 6 made of aluminum alloy is fitted. The wedge-shaped collar 5 is screwed into the nut-fitting male thread 9 of the screw fitting 1, and the wedge-shaped collar 5 is pressed through the annular base fitting 7 by the tightening force of the nut B with the inner flange, and the wedge-shaped collar 5 is pressed between the tapered hole 4 and the pipe body 6. The thick end of the wedge-shaped collar 5 is pushed open by the annular base metal fitting 7 and pressed against the inner surface of the inner 7-flange nut B.
前記管体３を構成するアルミニウム合金としては例えば
ＪＩＳ、Ａ ６０６６が用いられ、前記内側フランジ付
きナツト６を構成するアルミニウム合金としては例えば
ＪＩＳ、Ａ ６０６１が用いられ。For example, JIS A 6066 is used as the aluminum alloy constituting the tube body 3, and JIS A 6061 is used as the aluminum alloy constituting the inner flanged nut 6.
前記環状ベース金具７を構成するアルミニウム合金とし
ては例えばＪＩＳ、Ａ ７０７５が用いられ、また前記
楔状カラー５を構成するアルミニウム合金としては、ね
じ金具１．管体６．環状ベース金具７および内側７ラン
ジ付きナツト６を構成するアルミニウム合金よりも軟質
のもの例えばＪＩＳ。For example, JIS A 7075 is used as the aluminum alloy constituting the annular base metal fitting 7, and as the aluminum alloy constituting the wedge-shaped collar 5, the threaded metal fitting 1. Tube 6. A material softer than the aluminum alloy forming the annular base metal fitting 7 and the inner 7 flange nut 6, such as JIS.
Ａ１０５０−ＨＩ３．Ａ３０５２−ＨＩ３゜Ａ２０２４
−Ｔ４等が用いられる。A1050-HI3. A3052-HI3゜A2024
-T4 etc. are used.
前記ねじ金具１に設ける窒化チタンまたは窒化クロムの
硬質皮膜８の厚さが６μ未満であるときは、シール性能
の繰返し特性に劣り、また前記硬質皮膜８の厚さが１０
μを越えると、急激な温度変化の際に、硬質皮膜と母材
との温度膨張係数の差異により硬質皮膜にクラックが発
生する。したがって、硬質皮膜の厚さを３〜１０μの範
囲に設定するのが好ましく、この範囲に設定すれば、常
温から液体窒素、液体ヒリウム等への急激な温度変化が
あっても、優れ几シール性能を有し、特に極低温用超高
真空継手としても使用することができる。When the thickness of the hard coating 8 of titanium nitride or chromium nitride provided on the screw fitting 1 is less than 6μ, the repeatability of sealing performance is poor;
If μ is exceeded, cracks will occur in the hard coating due to the difference in thermal expansion coefficient between the hard coating and the base material during a sudden temperature change. Therefore, it is preferable to set the thickness of the hard coating in the range of 3 to 10μ.If set in this range, excellent sealing performance will be achieved even if there is a sudden temperature change from room temperature to liquid nitrogen, liquid hylium, etc. In particular, it can be used as an ultra-high vacuum joint for extremely low temperatures.
この発明によれば、アルミニウム合金からなるオールメ
タル超高真空継手におけるねじ金具１の内面にイオンブ
レーティング処理による窒化チタンま几は窒化クロムの
硬質皮膜８を設は友ので、その硬質皮膜によってアルミ
ニウム合金からなるねじ金具１の内面からのガスの放出
を防止することができ、かつねじ金具ＩＫ硬質皮膜が設
けられると共に、楔状カラー５がねじ金具１．管体６お
よび環状ベース金具７よりも軟質であるので、ねじ金具
１．環状ベース金具７および管体６に対する楔状カラー
５のなじみが良くなり、そのため優れ几繰返しシール性
能が得られ、さらに摩耗変形等により交換を必要とする
部品は楔状カラー５だけであるので経済的である等の効
果が得られる。According to the present invention, since the titanium nitride film formed by ion-blating treatment is applied to the inner surface of the threaded fitting 1 in an all-metal ultra-high vacuum joint made of an aluminum alloy, a hard film 8 of chromium nitride is formed on the inner surface of the threaded fitting 1. It is possible to prevent the release of gas from the inner surface of the screw fitting 1 made of an alloy, and the screw fitting IK hard coating is provided, and the wedge-shaped collar 5 is attached to the screw fitting 1. Since it is softer than the pipe body 6 and the annular base metal fitting 7, the threaded metal fitting 1. The wedge-shaped collar 5 fits better into the annular base metal fitting 7 and the tube body 6, resulting in excellent repeatable sealing performance.Furthermore, the wedge-shaped collar 5 is the only part that needs to be replaced due to wear and deformation, so it is economical. Some effects can be obtained.
図面はこの発明の実施例を示すものであって、第１図は
オールメタル超高真空継手の一部縦断側面図、第２図は
そのオールメタル超高真空継手を分解して示す一部縦断
側面図、第６図は硬質皮膜を有するねじ金具の一部を拡
大して示す断面図である。
図において、１はねじ金具、２は管体嵌合孔、６は管体
、４はテーパー孔、５は楔状カラー、６は内側フランジ
付きナツト、７は環状ベース金具、８は硬質皮膜、９は
ナツト螺合用雄ねじ、１０は継手連結用雄ねじである。
。
Ｌ」The drawings show an embodiment of the present invention, in which Fig. 1 is a partially longitudinal side view of an all-metal ultra-high vacuum joint, and Fig. 2 is a partially longitudinal cross-sectional view showing the all-metal ultra-high vacuum joint exploded. The side view and FIG. 6 are sectional views showing an enlarged part of the screw fitting having a hard coating. In the figure, 1 is a screw fitting, 2 is a tube fitting hole, 6 is a tube, 4 is a tapered hole, 5 is a wedge-shaped collar, 6 is a nut with an inner flange, 7 is an annular base metal fitting, 8 is a hard coating, 9 10 is a male thread for nut screwing, and 10 is a male thread for connecting a joint. . L”
Claims (1)
２に管体３の端部が嵌入され、その管体３の外周面とね
じ金具１のテーパー孔４との間にアルミニウム合金の楔
状カラー５が嵌入され、ねじ金具１に螺合された内側フ
ランジ付きナット６により環状ベース金具７を介して楔
状カラー５が締付けられているオールメタル継手におい
て、前記ねじ金具１の内面に、イオンブレーティング処
理による窒化チタンまたは窒化クロムの硬質皮膜８が設
けられ、かつ前記楔状カラー５の材質が、ねじ金具１、
管体３および環状ベース金具７よりも軟質であることを
特徴とするオールメタル超高真空継手。The end of the tube 3 is fitted into the tube fitting hole 2 provided in the screw fitting 1 made of aluminum alloy, and a wedge-shaped aluminum alloy is inserted between the outer peripheral surface of the tube 3 and the tapered hole 4 of the screw fitting 1. In an all-metal joint in which a collar 5 is fitted and the wedge-shaped collar 5 is tightened via an annular base metal fitting 7 by an inner flange nut 6 screwed onto the threaded metal fitting 1, an ion bulb is attached to the inner surface of the threaded metal fitting 1. A hard coating 8 of titanium nitride or chromium nitride is provided by a rating treatment, and the material of the wedge-shaped collar 5 is the screw fitting 1,
An all-metal ultra-high vacuum joint characterized by being softer than a tube body 3 and an annular base fitting 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21852084A JPS6199790A (en) | 1984-10-19 | 1984-10-19 | All-metal ultra-high vacuum joint |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21852084A JPS6199790A (en) | 1984-10-19 | 1984-10-19 | All-metal ultra-high vacuum joint |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6199790A true JPS6199790A (en) | 1986-05-17 |
| JPH0333952B2 JPH0333952B2 (en) | 1991-05-20 |
Family
ID=16721216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21852084A Granted JPS6199790A (en) | 1984-10-19 | 1984-10-19 | All-metal ultra-high vacuum joint |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6199790A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007162879A (en) * | 2005-12-15 | 2007-06-28 | Tlv Co Ltd | Vapor eliminator of steam trap |
| JP2007303627A (en) * | 2006-05-15 | 2007-11-22 | Tlv Co Ltd | Steam eliminator for steam trap |
| JP2009008338A (en) * | 2007-06-28 | 2009-01-15 | Shinko Kogyo Co Ltd | Steam humidifier |
| WO2015146406A1 (en) * | 2014-03-24 | 2015-10-01 | ニッタ株式会社 | Pipe joint |
| JP2021048710A (en) * | 2019-09-19 | 2021-03-25 | 富士精工株式会社 | Wire fixture for coil |
-
1984
- 1984-10-19 JP JP21852084A patent/JPS6199790A/en active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007162879A (en) * | 2005-12-15 | 2007-06-28 | Tlv Co Ltd | Vapor eliminator of steam trap |
| JP2007303627A (en) * | 2006-05-15 | 2007-11-22 | Tlv Co Ltd | Steam eliminator for steam trap |
| JP2009008338A (en) * | 2007-06-28 | 2009-01-15 | Shinko Kogyo Co Ltd | Steam humidifier |
| WO2015146406A1 (en) * | 2014-03-24 | 2015-10-01 | ニッタ株式会社 | Pipe joint |
| JPWO2015146406A1 (en) * | 2014-03-24 | 2017-04-13 | ニッタ株式会社 | Pipe fitting |
| JP2021048710A (en) * | 2019-09-19 | 2021-03-25 | 富士精工株式会社 | Wire fixture for coil |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0333952B2 (en) | 1991-05-20 |
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