JPS6198501U - - Google Patents
Info
- Publication number
- JPS6198501U JPS6198501U JP18447484U JP18447484U JPS6198501U JP S6198501 U JPS6198501 U JP S6198501U JP 18447484 U JP18447484 U JP 18447484U JP 18447484 U JP18447484 U JP 18447484U JP S6198501 U JPS6198501 U JP S6198501U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- outer tube
- cross
- gap
- sectional area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 6
- 239000003507 refrigerant Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Description
第１図は本考案の一実施例を示し、ａは縦断面
図、ｂは冷却部の横断面図、第２図は従来の半導
体真空熱処理装置の断面図、第３図は第２図のク
ーリングトラツプの詳細断面図である。
２：クーリングトラツプ、２１：内管、２２：
外管、２４：空隙、２６：外管連結部、２７：外
管冷却部、２８：支持体、２９：粗面化内面。
FIG. 1 shows an embodiment of the present invention, in which a is a longitudinal cross-sectional view, b is a cross-sectional view of a cooling section, FIG. 2 is a cross-sectional view of a conventional semiconductor vacuum heat treatment apparatus, and FIG. FIG. 3 is a detailed sectional view of the cooling trap. 2: Cooling trap, 21: Inner pipe, 22:
Outer tube, 24: void, 26: outer tube connecting section, 27: outer tube cooling section, 28: support, 29: roughened inner surface.
Claims (1)
る外管および円管を備え、円管は外管との空隙に
配置された支持体により外管に固定されて外管の
底部の内面に対向して開口し、内管の内断面積は
外管と内管の空隙の断面積にほぼ等しく、かつ外
管の底部内面が粗面化されたことを特徴とするク
ーリングトラツプ。 The cooling section, which is immersed in the refrigerant, is equipped with an outer tube and a circular tube, both of which are straight tubes, and the circular tube is fixed to the outer tube by a support placed in the gap between the outer tube and the outer tube. A cooling trap characterized in that the inner tube has openings facing each other, the inner cross-sectional area of the inner tube is approximately equal to the cross-sectional area of the gap between the outer tube and the inner tube, and the inner surface of the bottom of the outer tube is roughened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18447484U JPS6198501U (en) | 1984-12-05 | 1984-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18447484U JPS6198501U (en) | 1984-12-05 | 1984-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6198501U true JPS6198501U (en) | 1986-06-24 |
Family
ID=30741963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18447484U Pending JPS6198501U (en) | 1984-12-05 | 1984-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6198501U (en) |
-
1984
- 1984-12-05 JP JP18447484U patent/JPS6198501U/ja active Pending