JPS6197739U - - Google Patents
Info
- Publication number
- JPS6197739U JPS6197739U JP18301184U JP18301184U JPS6197739U JP S6197739 U JPS6197739 U JP S6197739U JP 18301184 U JP18301184 U JP 18301184U JP 18301184 U JP18301184 U JP 18301184U JP S6197739 U JPS6197739 U JP S6197739U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm portion
- regions
- flow path
- pressure sensor
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18301184U JPS6197739U (fi) | 1984-11-30 | 1984-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18301184U JPS6197739U (fi) | 1984-11-30 | 1984-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6197739U true JPS6197739U (fi) | 1986-06-23 |
Family
ID=30740532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18301184U Pending JPS6197739U (fi) | 1984-11-30 | 1984-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6197739U (fi) |
-
1984
- 1984-11-30 JP JP18301184U patent/JPS6197739U/ja active Pending