JPS6197387U - - Google Patents

Info

Publication number

JPS6197387U

JPS6197387U JP18338284U JP18338284U JPS6197387U JP S6197387 U JPS6197387 U JP S6197387U JP 18338284 U JP18338284 U JP 18338284U JP 18338284 U JP18338284 U JP 18338284U JP S6197387 U JPS6197387 U JP S6197387U

Authority

JP

Japan

Prior art keywords

electron beam

room

exhaust system

valve

air valve

Prior art date

1984-12-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000003466 welding Methods 0.000 claims description 6
• 238000010894 electron beam technology Methods 0.000 claims description 5
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
• 230000001105 regulatory effect Effects 0.000 description 2
• 238000007791 dehumidification Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 229910052757 nitrogen Inorganic materials 0.000 description 1
• 230000003287 optical effect Effects 0.000 description 1
• 230000036316 preload Effects 0.000 description 1