JPS6196546U - - Google Patents

Info

Publication number

JPS6196546U

JPS6196546U JP18135884U JP18135884U JPS6196546U JP S6196546 U JPS6196546 U JP S6196546U JP 18135884 U JP18135884 U JP 18135884U JP 18135884 U JP18135884 U JP 18135884U JP S6196546 U JPS6196546 U JP S6196546U

Authority

JP

Japan

Prior art keywords

silicon wafer

stop position

wafer

conveyor belt

detects

Prior art date

1984-11-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
• 229910052710 silicon Inorganic materials 0.000 claims description 7
• 239000010703 silicon Substances 0.000 claims description 7
• 238000001514 detection method Methods 0.000 claims description 4
• 238000010586 diagram Methods 0.000 description 3
• 238000007796 conventional method Methods 0.000 description 1
• 239000000523 sample Substances 0.000 description 1