JPS6196540U - - Google Patents

Info

Publication number

JPS6196540U

JPS6196540U JP18182884U JP18182884U JPS6196540U JP S6196540 U JPS6196540 U JP S6196540U JP 18182884 U JP18182884 U JP 18182884U JP 18182884 U JP18182884 U JP 18182884U JP S6196540 U JPS6196540 U JP S6196540U

Authority

JP

Japan

Prior art keywords

core tube

furnace core

semiconductor substrates

hydrogen

oxidizing semiconductor

Prior art date

1984-11-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000001257 hydrogen Substances 0.000 claims description 3
• 229910052739 hydrogen Inorganic materials 0.000 claims description 3
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
• 230000001590 oxidative effect Effects 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 239000000758 substrate Substances 0.000 claims 2
• 150000002431 hydrogen Chemical class 0.000 claims 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1