JPS6196537U - - Google Patents
Info
- Publication number
- JPS6196537U JPS6196537U JP1984181537U JP18153784U JPS6196537U JP S6196537 U JPS6196537 U JP S6196537U JP 1984181537 U JP1984181537 U JP 1984181537U JP 18153784 U JP18153784 U JP 18153784U JP S6196537 U JPS6196537 U JP S6196537U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- chamber
- rotary
- exhaust chamber
- rotary processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984181537U JPH0132359Y2 (enExample) | 1984-11-28 | 1984-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984181537U JPH0132359Y2 (enExample) | 1984-11-28 | 1984-11-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6196537U true JPS6196537U (enExample) | 1986-06-21 |
| JPH0132359Y2 JPH0132359Y2 (enExample) | 1989-10-03 |
Family
ID=30739088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984181537U Expired JPH0132359Y2 (enExample) | 1984-11-28 | 1984-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0132359Y2 (enExample) |
-
1984
- 1984-11-28 JP JP1984181537U patent/JPH0132359Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0132359Y2 (enExample) | 1989-10-03 |