JPS6196536U - - Google Patents

Info

Publication number
JPS6196536U
JPS6196536U JP18175684U JP18175684U JPS6196536U JP S6196536 U JPS6196536 U JP S6196536U JP 18175684 U JP18175684 U JP 18175684U JP 18175684 U JP18175684 U JP 18175684U JP S6196536 U JPS6196536 U JP S6196536U
Authority
JP
Japan
Prior art keywords
gas
inner tube
tube
inlet
receiving portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18175684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0219960Y2 (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18175684U priority Critical patent/JPH0219960Y2/ja
Publication of JPS6196536U publication Critical patent/JPS6196536U/ja
Application granted granted Critical
Publication of JPH0219960Y2 publication Critical patent/JPH0219960Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP18175684U 1984-11-30 1984-11-30 Expired JPH0219960Y2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18175684U JPH0219960Y2 (US20090163788A1-20090625-C00002.png) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18175684U JPH0219960Y2 (US20090163788A1-20090625-C00002.png) 1984-11-30 1984-11-30

Publications (2)

Publication Number Publication Date
JPS6196536U true JPS6196536U (US20090163788A1-20090625-C00002.png) 1986-06-21
JPH0219960Y2 JPH0219960Y2 (US20090163788A1-20090625-C00002.png) 1990-05-31

Family

ID=30739297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18175684U Expired JPH0219960Y2 (US20090163788A1-20090625-C00002.png) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPH0219960Y2 (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207926A (ja) * 1988-02-16 1989-08-21 Toshiba Corp 半導体ウェハの処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207926A (ja) * 1988-02-16 1989-08-21 Toshiba Corp 半導体ウェハの処理装置

Also Published As

Publication number Publication date
JPH0219960Y2 (US20090163788A1-20090625-C00002.png) 1990-05-31

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