JPS6196342A - Air purifying method - Google Patents

Air purifying method

Info

Publication number
JPS6196342A
JPS6196342A JP59216293A JP21629384A JPS6196342A JP S6196342 A JPS6196342 A JP S6196342A JP 59216293 A JP59216293 A JP 59216293A JP 21629384 A JP21629384 A JP 21629384A JP S6196342 A JPS6196342 A JP S6196342A
Authority
JP
Japan
Prior art keywords
air
filter
clean
microorganisms
fine particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59216293A
Other languages
Japanese (ja)
Other versions
JPH042852B2 (en
Inventor
Toshiaki Fujii
敏昭 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP59216293A priority Critical patent/JPS6196342A/en
Publication of JPS6196342A publication Critical patent/JPS6196342A/en
Publication of JPH042852B2 publication Critical patent/JPH042852B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/20Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by sterilisation
    • F24F8/22Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by sterilisation using UV light

Abstract

PURPOSE:To furnish a biologically clean room, in which the air polluted with fine particles, microorganisms and the like is purified, by a method wherein ultraviolet rays are irradiated to the polluted air or the air is turned into inert gas by enriching with nitrogen. CONSTITUTION:When the air is intended to be supplied to a clean room 1, firstly, both the outside air, grits containing in which is removed by a pre-filter 3, and the air, which is taken out of the clean room 1 through an air outlet 4, are sent by a fan 5 to an air conditioner 6 in order to be air-conditioned (to be controlled the temperature and humidity of the resultant air) and, after that, to be removed fine particles in the air with a filter 7 in order to be supplied to the clean room 1, resulting in keeping the cleanness of the room 1 at the level of the class 100,000. On the other hand, as for a working area, due to a clean booth 12 consisting of a fan 8, an ultraviolet-light irradiating unit 9, an electrostatic filter 10 and a transparent curtain 11, the cleanness on a work table 13 is kept at the level of the class 100. Fine particles including dead microorganisms are collected with the electrostatic filter 10.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、室内の空気を浄化する空気清浄方法に関し、
特にバイオロジカルクリーンムールの空気清浄に実施し
て好適な空気清浄方法に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an air purification method for purifying indoor air.
In particular, the present invention relates to an air purification method suitable for use in air purification in biological clean rooms.

[従来技術] この種の方法を大別すると、(i)機械的紹過による機
械式フィルタ一方式と、(ii)静電気的に捕集を行う
静電式フィルタ一方式がある。
[Prior Art] This type of method can be roughly divided into (i) a mechanical filter type that uses mechanical introduction, and (ii) an electrostatic filter type that performs collection electrostatically.

このうち、(i)の方式の主な構成はファン及びフィル
ターであり、清浄度を上げるために目が細かいフィルタ
ーを使用している。この方式は一般に集塵効率が高いが
圧損も高い。このため圧1Ωを小さくしようとしてフィ
ルターの目を粗くすると集塵効率が低下する。又目づま
りによる圧力損失の増加が著しく、フィルターの寿命が
短かく、。
Among these, the main components of method (i) are a fan and a filter, and a fine-mesh filter is used to improve cleanliness. This method generally has high dust collection efficiency, but also high pressure loss. For this reason, if the mesh of the filter is made coarser in an attempt to reduce the pressure of 1Ω, the dust collection efficiency will decrease. In addition, the pressure loss due to clogging increases significantly, and the life of the filter is shortened.

かつフィルターの価格も高い。Also, the price of the filter is high.

クリーンルーム工場(例えば半導体製造)でのフィルタ
ー交換では、その期間工場をス]−ツブせねばならない
。又復帰まで時間がかかった。このため生産能力に無駄
があった。更に清浄度を上げるために換気回数を増やす
ので動力費がなかつかかった。
Replacing filters in a clean room factory (for example, semiconductor manufacturing) requires shutting down the factory for a period of time. It took a while to come back again. This resulted in wasted production capacity. Furthermore, in order to improve cleanliness, the number of ventilations was increased, which reduced power costs.

又(11)の方式の主な構成はファン、予漏荷電部、静
電フィルターであり、予備荷電部は高圧電源を要した。
Furthermore, the main components of the method (11) are a fan, a pre-leakage charging section, and an electrostatic filter, and the pre-charging section requires a high-voltage power source.

このため装置の大型化、安全性の問題、維持管理の複雑
さく例えば極板上へ粒子の1(L積及び飛散があり、高
いクリーン度を維持するにはかなりの安全率を見込んだ
運転を必要とし、コスト高となる。)などがあった。
This increases the size of the equipment, raises safety issues, complicates maintenance, and, for example, causes particles to accumulate and scatter onto the electrode plates. To maintain a high degree of cleanliness, operation must be performed with a considerable safety factor in mind. ), resulting in high costs.

以上のように(1)及び(11)の空気清浄方式は、コ
ストの面で問題があった。またこれらの方式は工業的ク
リーンルームには使用できるが、バイオロジカルクリー
ンルーム関係(クリーンベンチ、タリントンネルなど局
所高クリーン装置を含む)への使用は困難であった。即
ちフィルターには必ずピンホールがあり汚染空気の一部
がリークしているため、フィルターのみによる(り及び
(11)の空気清掃方式はバイオロジカルクリーンルー
ムへの使用には限界がある(ある種の微生物は短時間に
かなり増殖して危険である)。
As mentioned above, the air cleaning methods (1) and (11) have problems in terms of cost. Furthermore, although these methods can be used in industrial cleanrooms, it has been difficult to use them in biological cleanrooms (including local high-cleanliness equipment such as clean benches and Tallinn tunnels). In other words, filters always have pinholes and some contaminated air leaks out, so the air cleaning methods (11) and (11) using only filters have limitations in their use in biological clean rooms (some types of (Microorganisms can multiply rapidly in a short period of time and are dangerous).

[発明の目的] 従って本発明の目的は、フィルターのみによる空気清浄
方法の前記欠点を解消し、特にバイオロジカルクリーン
ルームの空気清浄に実施して好適な空気清浄方法を提供
するにある。
[Object of the Invention] Accordingly, an object of the present invention is to provide an air purification method suitable for eliminating the above-mentioned drawbacks of air purification methods using only filters, and particularly suitable for air purification in biological clean rooms.

[発明の構成] このため本発明によれば、微粒子や微生物等を含む汚染
空気の浄化にあたって、汚染空気に紫外線を照射し、死
滅した微生物を含む微粒子をフィルターにより捕集する
。また本発明によれば、微粒子や微生物等を含む汚染空
気の浄化にあたって窒素富化空気を用いる。また必要に
応じて該窒素富化空気に紫外線を照射し、死滅した微生
物等を含む微粒子をフィルターにより捕集する。
[Structure of the Invention] Therefore, according to the present invention, in purifying contaminated air containing fine particles, microorganisms, etc., the contaminated air is irradiated with ultraviolet rays, and the fine particles containing dead microorganisms are collected by a filter. Further, according to the present invention, nitrogen-enriched air is used to purify contaminated air containing fine particles, microorganisms, and the like. Further, if necessary, the nitrogen-enriched air is irradiated with ultraviolet rays, and particulates containing dead microorganisms and the like are collected by a filter.

このように本発明は、汚染空気に紫外線の照射を行い、
又は空気を窒素富化空気となして不活性ガス化あるいは
必要に応じて窒素富化空気に紫外線を照射するものであ
るので、フィルターのピンホール等から汚染空気の一部
がリークすることがあったとしても、ある種の微生物の
短時間における増殖の危険等は回避され、バイオロジカ
ルクリーンルームの空気清浄として極めて好適に実施し
得る。
In this way, the present invention irradiates contaminated air with ultraviolet rays,
Alternatively, since the air is converted into nitrogen-enriched air and turned into an inert gas, or if necessary, the nitrogen-enriched air is irradiated with ultraviolet rays, there is a risk that some contaminated air may leak through pinholes in the filter. Even so, the risk of proliferation of certain microorganisms in a short period of time is avoided, and the method can be very suitably used for air purification in biological clean rooms.

本発明の実施に際しては、紫外線としては遠紫外線を用
いるのが好ましい。また流入空気を予めプレフィルタに
通して微粒子を除去し、さらに流入空気に旋回運動を与
えて紫外線照射を行うようにすると良い。また死滅した
微生物を含む微粒子を捕集するフィルターとしては静電
フィルターが好適に用い得る。窒素富化に際しては窒素
の濃度は82%以上とする。
When carrying out the present invention, it is preferable to use deep ultraviolet rays as the ultraviolet rays. Further, it is preferable that the incoming air is passed through a pre-filter in advance to remove particulates, and then the incoming air is given a swirling motion to perform ultraviolet irradiation. Furthermore, an electrostatic filter can be suitably used as a filter for collecting fine particles containing dead microorganisms. When enriching with nitrogen, the concentration of nitrogen should be 82% or more.

[実施例] 以下、本発明をバイオロジカルクリーンルームにおける
クリーンブース併用方式(作業領域内のある一部だけを
高清浄度にする方式の一つ)に実施した場合を例に上げ
、その実施例につき説明する。 第1図に本発明の第1
実施例を示し、従来のメカニカルフィルタ− 内を中程度清浄度に保ち、作業場のみ高清浄度を保つも
のである。クリーンルーム1の空気は外気2に含まれる
粗粒子をプレフィルタ−3にて除いた空気及びクリーン
ルーム1内の空気を空気取出口4から取出し、ファン5
を介して空気調和装置6にて空気調和(温度、湿度の制
御Il)後、フィルター7により微粒子を除去し供給さ
れ、清浄度(クラス)100000が保持される。
[Example] The following is an example of a case in which the present invention is implemented in a clean booth combination method in a biological clean room (one of the methods to achieve high cleanliness only in a certain part of the work area), and the example will be described below. explain. FIG. 1 shows the first embodiment of the present invention.
An example is shown in which the interior of a conventional mechanical filter is maintained at a medium level of cleanliness, and only the workplace is maintained at a high degree of cleanliness. The air in the clean room 1 is obtained by removing coarse particles contained in the outside air 2 using a pre-filter 3, and the air inside the clean room 1 is taken out from the air intake port 4, and the fan 5
After the air is conditioned (temperature and humidity controlled Il) by an air conditioner 6, fine particles are removed by a filter 7 and the air is supplied to maintain a cleanliness level (class) of 100,000.

一方、作業場はファン8、紫外線照射部9、静電フィル
ター10、透明カーテン11からなるクリーンブース1
2により作業台13上が清浄度(クラス)10oが保持
される。クリーンブース12ではクリーンルーム1内の
清浄度(クラス)1 00000の空気がファン8によ
り吸引され、紫外線照射部9で紫外線照射される。ここ
では紫外線照射により粒子が荷電し、又微生物(例えば
ウィルス、バクテリヤ、各種菌類、酵母、かび)が殺菌
される。
On the other hand, the work area is a clean booth 1 consisting of a fan 8, an ultraviolet irradiation unit 9, an electrostatic filter 10, and a transparent curtain 11.
2, the cleanliness (class) 10o is maintained on the workbench 13. In the clean booth 12 , air with a cleanliness level (class) of 100,000 in the clean room 1 is sucked in by a fan 8 and irradiated with ultraviolet rays by an ultraviolet irradiation unit 9 . Here, particles are charged by ultraviolet irradiation, and microorganisms (such as viruses, bacteria, various fungi, yeast, and mold) are sterilized.

紫外線の種類は微粒子の荷電及び微生物の殺菌作用があ
れば何でも良いが、効率などの観点からは遠紫外線(1
900A’以下)が好ましい。又ファンにより旋回運動
を与え、紫外線照射効率を高めることができる。
Any type of ultraviolet rays may be used as long as it has the ability to charge particles and sterilize microorganisms, but from the viewpoint of efficiency, far ultraviolet rays (1
900A' or less) is preferred. Furthermore, a rotating motion can be provided by a fan to increase the efficiency of ultraviolet irradiation.

死滅した微生物を含む微粒子は静電フィルター10で捕
集される。静電フィルターは静電フィルタ一方式であれ
ば何でも良く、通常、ガラス繊維を電気力線により分極
した構造のものを用いるが、スチールウールを不電極と
したような捕東部自身が電極である構造も有効である。
Fine particles containing dead microorganisms are collected by an electrostatic filter 10. Any electrostatic filter can be used as long as it is a one-type electrostatic filter. Usually, a structure in which glass fiber is polarized by electric lines of force is used, but a structure in which the cap itself is an electrode, such as steel wool as a non-electrode, is used. is also valid.

静電フィルタ一部は一定期間の使用で目づまりを生ずる
ので、必要に応じカートリッジ構造とし、圧力損失の検
出(図示せず)により交換することでクリーンルーム全
体を安全運転することができる。
Since some of the electrostatic filters become clogged after use for a certain period of time, the entire clean room can be operated safely by using a cartridge structure as necessary and replacing them by detecting pressure loss (not shown).

ファン8、紫外線照射部9、静電フィルタ一部10の配
設類は通常は前述の順であるが、空気清浄°方式の型式
の規模(小型、中型、大型)、気流の方式(水平形、垂
直形、循環形)などにより異なる。
The fan 8, ultraviolet irradiation unit 9, and part of the electrostatic filter 10 are normally arranged in the order described above, but the size of the air purification type (small, medium, large) and the airflow type (horizontal type) , vertical type, circular type), etc.

バイオロジカルクリーンルームも前述の方式に従い同様
に作ることができるが、コストを安くしたい場合(特に
クラス1,0、クラス100のように高い清浄度が必要
な場合)は、室全体は前述の方式又は従来の方式で中程
度の清浄度(例えばクラス10000、クラス1000
00)にし、作業場(例えばクリーンブース、クリーン
ベンチ、クリーントンネル)のみ前述の方式により轟清
浄麿とする。
Biological clean rooms can also be built in the same way according to the above method, but if you want to reduce costs (especially when high cleanliness is required such as class 1, 0 or class 100), the entire room can be constructed using the above method or Medium cleanliness (e.g. class 10000, class 1000
00), and only the workplace (for example, clean booth, clean bench, clean tunnel) is thoroughly cleaned using the method described above.

水沫の用途例としては、小型の装置の場合は事務室、遊
戯場用空気清浄器が、又中型の装置の場合はクリーンブ
ース、クリーンベンチ、クリーントンネル、無菌送風装
置、エアーシャワー、パスボックスが更に大型の装置の
場合はクリーンルーム、特にバイオロジカルクリーンル
ームが挙げられる。
Examples of uses for water droplets include air purifiers for offices and playgrounds for small devices, and clean booths, clean benches, clean tunnels, sterile air blowers, air showers, and pass boxes for medium-sized devices. In the case of even larger equipment, clean rooms, especially biological clean rooms, can be mentioned.

第2図に本発明の第2実施例を示し、この実施例は窒素
富化空気による不活性化が行われる。
FIG. 2 shows a second embodiment of the invention, in which inerting is performed with nitrogen-enriched air.

第2図においてメカニカルフィルターによりクリーンル
ーム1内を中程度の清浄度(クラス)に保ち、作業場(
クリーンベンチ15内)のみを水沫により高清浄不活性
雰囲気に保つものである。
In Figure 2, the interior of clean room 1 is maintained at a medium level of cleanliness (class) using a mechanical filter, and the work area (
Only the inside of the clean bench 15 is kept in a highly clean and inert atmosphere by spraying water.

第1実施例の場合と同様、クリーンルーム1の空気は外
気2に含まれる粗粒子をプレフィルタ3にて除いた空気
及びクリーンルーム1内の空気を空気取出口4から取出
し、ファン5を介して空気調和装置6にて空WA(温度
、湿度の制御)後、フィルター7により微粒子を除去し
供給され、清浄度(クラス)100000が保持される
As in the case of the first embodiment, the air in the clean room 1 is obtained by removing coarse particles contained in the outside air 2 with the prefilter 3, and the air inside the clean room 1 is taken out from the air intake port 4, and the air is passed through the fan 5. After air WA (temperature and humidity control) is performed in the conditioner 6, fine particles are removed by the filter 7 and the air is supplied to maintain a cleanliness level (class) of 100,000.

クリーンベンチ15ではクリーンルーム1内の清浄度(
クラス)100000の空気が窒素富化膜室14に吸引
ブロワ−17により吸引される。
The clean bench 15 measures the cleanliness inside the clean room 1 (
Class) 100,000 air is sucked into the nitrogen-enriched membrane chamber 14 by a suction blower 17.

窒素富化膜室14は主に空気吸入部及び窒素富化膜セル
よりなり、空気中の酸素を分離し窒素富化空気が得られ
、この空気はファン18により作業台13上を一定気流
で通気される。
The nitrogen-enriching membrane chamber 14 mainly consists of an air suction section and a nitrogen-enriching membrane cell, and separates oxygen from the air to obtain nitrogen-enriched air. Ventilated.

ここでの窒素lIaは82%以上、好ましくは85%以
上、最も好ましくは90%以上であり、最適濃度は作業
の種類、適用分野、用途、経済性などにより決まる。一
般に薬品や食品関係のように無菌状態での作業が好まし
い場合は窒素11度は高い方が好ましいが、医療、農林
、畜産関係のように菌、かび組織の培養を行う場合は窒
素濃度は比較的低くて良い。
Nitrogen IIa here is 82% or more, preferably 85% or more, most preferably 90% or more, and the optimum concentration is determined by the type of work, field of application, use, economy, etc. In general, when working in aseptic conditions, such as in the pharmaceutical and food industries, a higher nitrogen concentration of 11 degrees is preferable, but when culturing bacteria and mold tissue, such as in the medical, agricultural, forestry, and livestock industries, the nitrogen concentration is comparatively low. It's good to be short on the mark.

次いで窒素富化空気は紫外線照射部9にて紫外線照射さ
れ、微生物(例えばウィルス、バクテリヤ、各種菌類、
酵母、かび)が殺菌される。次いでフィルター10によ
り微生物死骸を含む微粒子が除去され、不活性及び殺菌
空気が一定気流で作業台13上を覆う。
Next, the nitrogen-enriched air is irradiated with ultraviolet rays in the ultraviolet irradiation section 9 to remove microorganisms (e.g. viruses, bacteria, various fungi,
Yeast, mold) are sterilized. A filter 10 then removes particulates, including dead microorganisms, and a constant flow of inert and sterile air covers the workbench 13.

クリーンベンチ15内の作業台13への器具、製品等の
出し入れはクリーンベンチ15に付設の可動シャッター
16により行う。窒素富化膜室14、紫外線照射部9、
フィルタ一部10、ファン18の配列順は通常において
は、前述の順であるが、空気油滓方式の型式の規模、気
流の方式などによって異なってくる・。又、窒素富化空
気で目的が達成し、紫外線照射による荷電及び/又は殺
菌が不要な場合は、紫外線照射に係る部分が省略できる
ことは言うまでもない。本方法の適用分野としては医療
、薬品、食品、農林畜産が挙げられ、又用途としてはク
リーンブース、クリーントンネル、クリーンベンチ、安
全キャビネット、無菌室、パスボックス、無菌エアカー
テンが挙げられる。
Instruments, products, etc. are taken in and out of the workbench 13 in the clean bench 15 using a movable shutter 16 attached to the clean bench 15. nitrogen enrichment membrane chamber 14, ultraviolet irradiation section 9,
The arrangement order of the filter part 10 and the fan 18 is normally the above-mentioned order, but it may vary depending on the scale of the air-oil soap type type, the airflow method, etc. Further, it goes without saying that if the purpose is achieved with nitrogen-enriched air and charging and/or sterilization by ultraviolet irradiation is not necessary, the part related to ultraviolet irradiation can be omitted. Fields of application of this method include medical care, pharmaceuticals, food, agriculture, forestry and livestock, and applications include clean booths, clean tunnels, clean benches, safety cabinets, sterile rooms, pass boxes, and sterile air curtains.

[発明の作用効果] 本発明による作用効果を列挙すれば次のようである。[Actions and effects of the invention] The effects of the present invention are listed below.

(イ) 微生物の殺菌ができ、殺菌クリーン空気が得ら
れる。
(b) Microorganisms can be sterilized and sterilized clean air can be obtained.

(ロ) バイオテクノロジー関係(例えば医療、薬品、
食品、農林畜産関係)のように微生物の存在が重大で微
粒子の存在があまり重大でない場合有効である。
(b) Biotechnology-related (e.g. medical, pharmaceutical,
It is effective in cases where the presence of microorganisms is important and the presence of fine particles is not so important, such as in food, agriculture, forestry and livestock industries.

(ハ) 従来のメカニカルフィルターではピンホールの
ためリークがあり、バイオテクノロジー関係ではリーク
空気等に起因する微生物のもれ込み、急激な増殖、汚染
が心配されたが、殺菌作用によりフィルターでの捕集は
厳密なものではなくてもよく、又リークも許容できる。
(c) Conventional mechanical filters have leaks due to pinholes, and in the biotechnology field, there were concerns about leakage of microorganisms, rapid multiplication, and contamination due to leaked air. The collection does not have to be strict, and leaks can be tolerated.

(ニ) 作業場のフィルターは前述のことからして比較
的口の粗いものでよく、換気回数も少なくてよいことか
ら交換頻度が少なくなる(長持ちし、維持、管理が容易
)。又動力費も安くなる。
(d) In view of the above, the filters in the workplace need only be relatively coarse, and the frequency of ventilation can be reduced, which means that they need to be replaced less frequently (they last longer and are easier to maintain and manage). Also, power costs will be lower.

(ホ) 微生物死骸を含む微粒子は予備荷電されるので
、後流に静電式フィルターを備えることで効率良く除去
できる。
(e) Since fine particles containing dead microorganisms are pre-charged, they can be efficiently removed by providing an electrostatic filter downstream.

(へ) 不活性でかつ微生物の殺菌ができ、不活性な殺
菌クリーン空気が得られる。
(f) It is inert and can sterilize microorganisms, providing inert, sterile, clean air.

(ト)  02がすくないことから03 、NOXのよ
うな有害成分の発生がない。
(g) Since there is less 02, there is no generation of harmful components such as 03 and NOx.

(チ) 窒素富化空気出口の逆の810は酸素富化空気
になり、この空気は燃焼装置笠へ供給するなどして有効
利用できる。またこの空気は医療用(例えば02ボンベ
の代用)に有効利用できる。
(H) The outlet 810 opposite to the nitrogen-enriched air outlet becomes oxygen-enriched air, and this air can be effectively used by supplying it to the combustion equipment shade. Moreover, this air can be effectively used for medical purposes (for example, as a substitute for 02 cylinders).

(す) 主な構成はファン部、紫外線照射部、フィルタ
一部、或いは吸引ブロワ−及びファン部、窒素富化部、
紫外線照射部、フィルタ一部であり、維持管理が安全で
安全性の問題もない。また、不活性な空気が得られるこ
とから微生物の活動が沈静化し、バイオテクノロジー関
連設備において有用となる。
(S) The main components are the fan section, ultraviolet irradiation section, part of the filter, or suction blower and fan section, nitrogen enrichment section,
It is part of the ultraviolet irradiation part and part of the filter, so maintenance is safe and there are no safety issues. In addition, since inert air is obtained, microbial activity is calmed down, making it useful in biotechnology-related equipment.

以上のようであって、今後急激な発展が期待されるバイ
オテクノロジーの研究開発に寄与できるところが大きい
As described above, this technology can greatly contribute to the research and development of biotechnology, which is expected to rapidly develop in the future.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1実施例の方法を実施する装置の系
統図、第2図は本発明の第2実施例の方法を実施する装
置の系統図である。 1・・・クリーンルーム  2・・外気  3・・・プ
レフィルタ−4・・・空気取出口5・・・ファン  6
・・・空気調和装置7・・・フィルター  8・°・・
ファン  9・・・紫外線照射部  10・・・静電フ
ィルター11・・・透明力“−テン  12・・・クリ
ーンブース  13・・・作業台  14・・・窒素富
化膜室  15・・・クリーンベンチ16・・・可動シ
ャッター  17・・・吸引ブロワ−18・・・ファン 一≧ 入 じ )り 、シi 」 第1図 第2図
FIG. 1 is a system diagram of an apparatus for implementing the method of the first embodiment of the present invention, and FIG. 2 is a system diagram of the apparatus for implementing the method of the second embodiment of the invention. 1...Clean room 2...Outside air 3...Pre-filter 4...Air intake port 5...Fan 6
...Air conditioner 7...Filter 8.°...
Fan 9...Ultraviolet irradiation section 10...Electrostatic filter 11...Transparency 12...Clean booth 13...Work table 14...Nitrogen enrichment membrane chamber 15...Clean Bench 16... Movable shutter 17... Suction blower 18... Fan

Claims (2)

【特許請求の範囲】[Claims] (1)微粒子や微生物等を含む汚染空気の浄化にあたっ
て、汚染空気に紫外線を照射し、死滅した微生物を含む
微粒子をフィルターにより捕集することを特徴とする空
気清浄方法。
(1) An air purification method characterized by irradiating the contaminated air with ultraviolet rays and collecting the dead particles containing the microorganisms with a filter in purifying the contaminated air containing particles and microorganisms.
(2)微粒子や微生物等を含む汚染空気の浄化にあたっ
て、汚染空気を窒素富化空気となし、該窒素富化空気に
紫外線を照射し、死滅した微生物を含む微粒子をフィル
ターにより捕集することを特徴とする空気清浄方法。
(2) In purifying contaminated air containing fine particles and microorganisms, the contaminated air is converted into nitrogen-enriched air, the nitrogen-enriched air is irradiated with ultraviolet rays, and the fine particles containing dead microorganisms are collected using a filter. A distinctive air purification method.
JP59216293A 1984-10-17 1984-10-17 Air purifying method Granted JPS6196342A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59216293A JPS6196342A (en) 1984-10-17 1984-10-17 Air purifying method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59216293A JPS6196342A (en) 1984-10-17 1984-10-17 Air purifying method

Publications (2)

Publication Number Publication Date
JPS6196342A true JPS6196342A (en) 1986-05-15
JPH042852B2 JPH042852B2 (en) 1992-01-21

Family

ID=16686263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59216293A Granted JPS6196342A (en) 1984-10-17 1984-10-17 Air purifying method

Country Status (1)

Country Link
JP (1) JPS6196342A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111402U (en) * 1987-01-12 1988-07-18
CN102538092A (en) * 2012-03-07 2012-07-04 林宏彬 Intelligent air treatment device
WO2018073995A1 (en) * 2016-10-19 2018-04-26 株式会社日立産機システム Biosafety cabinet and clean air device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111402U (en) * 1987-01-12 1988-07-18
CN102538092A (en) * 2012-03-07 2012-07-04 林宏彬 Intelligent air treatment device
WO2018073995A1 (en) * 2016-10-19 2018-04-26 株式会社日立産機システム Biosafety cabinet and clean air device
JPWO2018073995A1 (en) * 2016-10-19 2019-04-04 株式会社日立産機システム Safety cabinet and clean air equipment
US10874012B2 (en) 2016-10-19 2020-12-22 Hitachi Industrial Equipment Systems Co., Ltd. Biosafety cabinet and clean air device

Also Published As

Publication number Publication date
JPH042852B2 (en) 1992-01-21

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