JPS6194705U - - Google Patents

Info

Publication number
JPS6194705U
JPS6194705U JP17988584U JP17988584U JPS6194705U JP S6194705 U JPS6194705 U JP S6194705U JP 17988584 U JP17988584 U JP 17988584U JP 17988584 U JP17988584 U JP 17988584U JP S6194705 U JPS6194705 U JP S6194705U
Authority
JP
Japan
Prior art keywords
light
receiving
reference surface
side reference
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17988584U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17988584U priority Critical patent/JPS6194705U/ja
Publication of JPS6194705U publication Critical patent/JPS6194705U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP17988584U 1984-11-27 1984-11-27 Pending JPS6194705U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17988584U JPS6194705U (enrdf_load_stackoverflow) 1984-11-27 1984-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17988584U JPS6194705U (enrdf_load_stackoverflow) 1984-11-27 1984-11-27

Publications (1)

Publication Number Publication Date
JPS6194705U true JPS6194705U (enrdf_load_stackoverflow) 1986-06-18

Family

ID=30737450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17988584U Pending JPS6194705U (enrdf_load_stackoverflow) 1984-11-27 1984-11-27

Country Status (1)

Country Link
JP (1) JPS6194705U (enrdf_load_stackoverflow)

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