JPS6194561U - - Google Patents
Info
- Publication number
- JPS6194561U JPS6194561U JP18058584U JP18058584U JPS6194561U JP S6194561 U JPS6194561 U JP S6194561U JP 18058584 U JP18058584 U JP 18058584U JP 18058584 U JP18058584 U JP 18058584U JP S6194561 U JPS6194561 U JP S6194561U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- hexode
- support table
- substantially hemispherical
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001020 plasma etching Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18058584U JPS6194561U (enExample) | 1984-11-28 | 1984-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18058584U JPS6194561U (enExample) | 1984-11-28 | 1984-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6194561U true JPS6194561U (enExample) | 1986-06-18 |
Family
ID=30738138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18058584U Pending JPS6194561U (enExample) | 1984-11-28 | 1984-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6194561U (enExample) |
-
1984
- 1984-11-28 JP JP18058584U patent/JPS6194561U/ja active Pending