JPS6194559U - - Google Patents

Info

Publication number

JPS6194559U

JPS6194559U JP18024684U JP18024684U JPS6194559U JP S6194559 U JPS6194559 U JP S6194559U JP 18024684 U JP18024684 U JP 18024684U JP 18024684 U JP18024684 U JP 18024684U JP S6194559 U JPS6194559 U JP S6194559U

Authority

JP

Japan

Prior art keywords

exhaust pipe

cvd apparatus

reaction chamber

plasma cvd

plasma

Prior art date

1984-11-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
• 238000010438 heat treatment Methods 0.000 claims 2
• 239000007789 gas Substances 0.000 claims 1
• 239000012495 reaction gas Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1