JPS6194557U - - Google Patents

Info

Publication number
JPS6194557U
JPS6194557U JP17766284U JP17766284U JPS6194557U JP S6194557 U JPS6194557 U JP S6194557U JP 17766284 U JP17766284 U JP 17766284U JP 17766284 U JP17766284 U JP 17766284U JP S6194557 U JPS6194557 U JP S6194557U
Authority
JP
Japan
Prior art keywords
substrate holder
substrate
base
sputtering device
frame materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17766284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17766284U priority Critical patent/JPS6194557U/ja
Publication of JPS6194557U publication Critical patent/JPS6194557U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17766284U 1984-11-22 1984-11-22 Pending JPS6194557U (US06168776-20010102-C00028.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17766284U JPS6194557U (US06168776-20010102-C00028.png) 1984-11-22 1984-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17766284U JPS6194557U (US06168776-20010102-C00028.png) 1984-11-22 1984-11-22

Publications (1)

Publication Number Publication Date
JPS6194557U true JPS6194557U (US06168776-20010102-C00028.png) 1986-06-18

Family

ID=30735232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17766284U Pending JPS6194557U (US06168776-20010102-C00028.png) 1984-11-22 1984-11-22

Country Status (1)

Country Link
JP (1) JPS6194557U (US06168776-20010102-C00028.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5615261B2 (US06168776-20010102-C00028.png) * 1973-06-04 1981-04-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5615261B2 (US06168776-20010102-C00028.png) * 1973-06-04 1981-04-09

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