JPS619388B2 - - Google Patents
Info
- Publication number
- JPS619388B2 JPS619388B2 JP15816681A JP15816681A JPS619388B2 JP S619388 B2 JPS619388 B2 JP S619388B2 JP 15816681 A JP15816681 A JP 15816681A JP 15816681 A JP15816681 A JP 15816681A JP S619388 B2 JPS619388 B2 JP S619388B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15816681A JPS5861270A (ja) | 1981-10-06 | 1981-10-06 | 化学的蒸着炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15816681A JPS5861270A (ja) | 1981-10-06 | 1981-10-06 | 化学的蒸着炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5861270A JPS5861270A (ja) | 1983-04-12 |
| JPS619388B2 true JPS619388B2 (cs) | 1986-03-22 |
Family
ID=15665707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15816681A Granted JPS5861270A (ja) | 1981-10-06 | 1981-10-06 | 化学的蒸着炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5861270A (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007061180A (ja) * | 2005-08-29 | 2007-03-15 | Hamamatsu Kagaku Gijutsu Kenkyu Shinkokai | 訓練装置 |
| JP2007268146A (ja) * | 2006-03-31 | 2007-10-18 | Matsushita Electric Works Ltd | 運動補助装置 |
| FR3044024B1 (fr) * | 2015-11-19 | 2017-12-22 | Herakles | Dispositif pour le revetement d'un ou plusieurs fils par un procede de depot en phase vapeur |
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1981
- 1981-10-06 JP JP15816681A patent/JPS5861270A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5861270A (ja) | 1983-04-12 |